6/26/2012	12:18:32 AM	Helium valve closed
6/26/2012	12:18:32 AM	PH3 valve closed
6/26/2012	12:18:32 AM	Main Vac valve closed
6/26/2012	12:18:32 AM	Bypass valve closed
6/26/2012	12:18:32 AM	H2 valve opened
6/26/2012	12:18:32 AM	BCl3 valve opened
6/26/2012	12:18:32 AM	SiCl4 pre valve opened
6/26/2012	12:18:32 AM	SiCl4 post valve opened
6/26/2012	12:18:32 AM	Bubbler valve opened
6/26/2012	12:18:32 AM	Helium MFC set to  0.000000
6/26/2012	12:18:32 AM	H2 MFC set to  450.000000
6/26/2012	12:18:33 AM	BCl3 MFC set to  0.750000
6/26/2012	12:18:33 AM	PH3 MFC set to  0.000000
6/26/2012	12:18:33 AM	SiCl4 MFC set to  50.000000
6/26/2012	12:18:33 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:18:33 AM	Tube furnace set to 1000
6/26/2012	12:55:33 AM	Helium valve closed
6/26/2012	12:55:33 AM	BCl3 valve closed
6/26/2012	12:55:33 AM	PH3 valve closed
6/26/2012	12:55:33 AM	SiCl4 pre valve closed
6/26/2012	12:55:33 AM	SiCl4 post valve closed
6/26/2012	12:55:33 AM	Main Vac valve closed
6/26/2012	12:55:33 AM	Bypass valve closed
6/26/2012	12:55:33 AM	H2 valve opened
6/26/2012	12:55:33 AM	Bubbler valve opened
6/26/2012	12:55:33 AM	Helium MFC set to  0.000000
6/26/2012	12:55:33 AM	H2 MFC set to  500.000000
6/26/2012	12:55:33 AM	BCl3 MFC set to  0.000000
6/26/2012	12:55:33 AM	PH3 MFC set to  0.000000
6/26/2012	12:55:33 AM	SiCl4 MFC set to  0.000000
6/26/2012	12:55:33 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:55:33 AM	Tube furnace set to 750
6/26/2012	1:10:33 AM	H2 valve closed
6/26/2012	1:10:33 AM	BCl3 valve closed
6/26/2012	1:10:33 AM	PH3 valve closed
6/26/2012	1:10:33 AM	SiCl4 pre valve closed
6/26/2012	1:10:33 AM	SiCl4 post valve closed
6/26/2012	1:10:33 AM	Main Vac valve closed
6/26/2012	1:10:33 AM	Bypass valve closed
6/26/2012	1:10:33 AM	Helium valve opened
6/26/2012	1:10:33 AM	Bubbler valve opened
6/26/2012	1:10:33 AM	Helium MFC set to  500.000000
6/26/2012	1:10:33 AM	H2 MFC set to  0.000000
6/26/2012	1:10:33 AM	BCl3 MFC set to  0.000000
6/26/2012	1:10:33 AM	PH3 MFC set to  0.000000
6/26/2012	1:10:33 AM	SiCl4 MFC set to  0.000000
6/26/2012	1:10:33 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:10:33 AM	Tube furnace set to 0
6/26/2012	1:30:33 AM	Helium valve closed
6/26/2012	1:30:33 AM	H2 valve closed
6/26/2012	1:30:33 AM	BCl3 valve closed
6/26/2012	1:30:33 AM	PH3 valve closed
6/26/2012	1:30:33 AM	SiCl4 pre valve closed
6/26/2012	1:30:33 AM	SiCl4 post valve closed
6/26/2012	1:30:33 AM	Main Vac valve closed
6/26/2012	1:30:33 AM	Bypass valve closed
6/26/2012	1:30:33 AM	Bubbler valve closed
6/26/2012	1:30:33 AM	Helium MFC set to  0.000000
6/26/2012	1:30:33 AM	H2 MFC set to  0.000000
6/26/2012	1:30:33 AM	BCl3 MFC set to  0.000000
6/26/2012	1:30:33 AM	PH3 MFC set to  0.000000
6/26/2012	1:30:33 AM	SiCl4 MFC set to  0.000000
6/26/2012	1:30:33 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:30:33 AM	Tube furnace set to 0
6/26/2012	1:50:33 AM	Helium valve closed
6/26/2012	1:50:33 AM	H2 valve closed
6/26/2012	1:50:33 AM	BCl3 valve closed
6/26/2012	1:50:33 AM	PH3 valve closed
6/26/2012	1:50:33 AM	SiCl4 pre valve closed
6/26/2012	1:50:33 AM	SiCl4 post valve closed
6/26/2012	1:50:33 AM	Main Vac valve closed
6/26/2012	1:50:33 AM	Bubbler valve closed
6/26/2012	1:50:33 AM	Bypass valve opened
6/26/2012	1:50:33 AM	Helium MFC set to  0.000000
6/26/2012	1:50:33 AM	H2 MFC set to  0.000000
6/26/2012	1:50:33 AM	BCl3 MFC set to  0.000000
6/26/2012	1:50:33 AM	PH3 MFC set to  0.000000
6/26/2012	1:50:33 AM	SiCl4 MFC set to  0.000000
6/26/2012	1:50:33 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:50:33 AM	Tube furnace set to 0
6/26/2012	1:51:25 AM	Helium valve closed
6/26/2012	1:51:25 AM	H2 valve closed
6/26/2012	1:51:25 AM	BCl3 valve closed
6/26/2012	1:51:25 AM	PH3 valve closed
6/26/2012	1:51:25 AM	SiCl4 pre valve closed
6/26/2012	1:51:25 AM	SiCl4 post valve closed
6/26/2012	1:51:25 AM	Main Vac valve closed
6/26/2012	1:51:25 AM	Bubbler valve closed
6/26/2012	1:51:25 AM	Bypass valve opened
6/26/2012	1:51:25 AM	Helium MFC set to  0.000000
6/26/2012	1:51:25 AM	H2 MFC set to  0.000000
6/26/2012	1:51:25 AM	BCl3 MFC set to  0.000000
6/26/2012	1:51:25 AM	PH3 MFC set to  0.000000
6/26/2012	1:51:25 AM	SiCl4 MFC set to  0.000000
6/26/2012	1:51:25 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:51:25 AM	Tube furnace set to 0
6/26/2012	1:52:25 AM	Helium valve closed
6/26/2012	1:52:25 AM	H2 valve closed
6/26/2012	1:52:25 AM	BCl3 valve closed
6/26/2012	1:52:25 AM	PH3 valve closed
6/26/2012	1:52:25 AM	SiCl4 pre valve closed
6/26/2012	1:52:25 AM	SiCl4 post valve closed
6/26/2012	1:52:25 AM	Bypass valve closed
6/26/2012	1:52:25 AM	Bubbler valve closed
6/26/2012	1:52:25 AM	Main Vac valve opened
6/26/2012	1:52:25 AM	Helium MFC set to  0.000000
6/26/2012	1:52:25 AM	H2 MFC set to  0.000000
6/26/2012	1:52:25 AM	BCl3 MFC set to  0.000000
6/26/2012	1:52:25 AM	PH3 MFC set to  0.000000
6/26/2012	1:52:25 AM	SiCl4 MFC set to  0.000000
6/26/2012	1:52:25 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:52:25 AM	Tube furnace set to 0
6/26/2012	2:52:25 AM	Run finished at 2:52 AM
6/26/2012	8:34:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	8:34:04 AM	Recipe started at 8:34 AM
6/26/2012	8:34:04 AM	Helium valve closed
6/26/2012	8:34:04 AM	H2 valve closed
6/26/2012	8:34:04 AM	BCl3 valve closed
6/26/2012	8:34:04 AM	PH3 valve closed
6/26/2012	8:34:04 AM	SiCl4 pre valve closed
6/26/2012	8:34:04 AM	SiCl4 post valve closed
6/26/2012	8:34:04 AM	Main Vac valve closed
6/26/2012	8:34:04 AM	Bypass valve closed
6/26/2012	8:34:04 AM	Bubbler valve closed
6/26/2012	8:34:04 AM	Helium MFC set to  0.000000
6/26/2012	8:34:04 AM	H2 MFC set to  0.000000
6/26/2012	8:34:04 AM	BCl3 MFC set to  0.000000
6/26/2012	8:34:04 AM	PH3 MFC set to  0.000000
6/26/2012	8:34:04 AM	SiCl4 MFC set to  0.000000
6/26/2012	8:34:04 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	8:34:04 AM	Tube furnace set to 0
6/26/2012	8:34:07 AM	H2 valve closed
6/26/2012	8:34:07 AM	BCl3 valve closed
6/26/2012	8:34:07 AM	PH3 valve closed
6/26/2012	8:34:07 AM	SiCl4 pre valve closed
6/26/2012	8:34:07 AM	SiCl4 post valve closed
6/26/2012	8:34:07 AM	Main Vac valve closed
6/26/2012	8:34:07 AM	Bypass valve closed
6/26/2012	8:34:07 AM	Bubbler valve closed
6/26/2012	8:34:07 AM	Helium valve opened
6/26/2012	8:34:07 AM	Helium MFC set to  500.000000
6/26/2012	8:34:07 AM	H2 MFC set to  0.000000
6/26/2012	8:34:07 AM	BCl3 MFC set to  0.000000
6/26/2012	8:34:07 AM	PH3 MFC set to  0.000000
6/26/2012	8:34:07 AM	SiCl4 MFC set to  0.000000
6/26/2012	8:34:07 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	8:34:07 AM	Tube furnace set to 0
6/26/2012	8:35:20 AM	Helium valve closed
6/26/2012	8:35:20 AM	H2 valve closed
6/26/2012	8:35:20 AM	BCl3 valve closed
6/26/2012	8:35:20 AM	PH3 valve closed
6/26/2012	8:35:20 AM	SiCl4 pre valve closed
6/26/2012	8:35:20 AM	SiCl4 post valve closed
6/26/2012	8:35:20 AM	Main Vac valve closed
6/26/2012	8:35:20 AM	Bypass valve closed
6/26/2012	8:35:20 AM	Bubbler valve closed
6/26/2012	8:35:20 AM	Helium MFC set to  0.000000
6/26/2012	8:35:20 AM	H2 MFC set to  0.000000
6/26/2012	8:35:20 AM	BCl3 MFC set to  0.000000
6/26/2012	8:35:20 AM	PH3 MFC set to  0.000000
6/26/2012	8:35:20 AM	SiCl4 MFC set to  0.000000
6/26/2012	8:35:20 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	8:35:21 AM	Tube furnace set to 0
6/26/2012	8:35:22 AM	Run finished at 8:35 AM
6/26/2012	8:35:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	8:37:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	8:37:20 AM	Recipe started at 8:37 AM
6/26/2012	8:37:20 AM	Helium valve closed
6/26/2012	8:37:20 AM	H2 valve closed
6/26/2012	8:37:20 AM	BCl3 valve closed
6/26/2012	8:37:20 AM	PH3 valve closed
6/26/2012	8:37:20 AM	SiCl4 pre valve closed
6/26/2012	8:37:20 AM	SiCl4 post valve closed
6/26/2012	8:37:20 AM	Main Vac valve closed
6/26/2012	8:37:20 AM	Bubbler valve closed
6/26/2012	8:37:20 AM	Bypass valve opened
6/26/2012	8:37:20 AM	Helium MFC set to  0.000000
6/26/2012	8:37:20 AM	H2 MFC set to  0.000000
6/26/2012	8:37:20 AM	BCl3 MFC set to  0.000000
6/26/2012	8:37:20 AM	PH3 MFC set to  0.000000
6/26/2012	8:37:20 AM	SiCl4 MFC set to  0.000000
6/26/2012	8:37:20 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	8:37:20 AM	Tube furnace set to 0
6/26/2012	8:38:25 AM	Helium valve closed
6/26/2012	8:38:25 AM	H2 valve closed
6/26/2012	8:38:25 AM	BCl3 valve closed
6/26/2012	8:38:25 AM	PH3 valve closed
6/26/2012	8:38:25 AM	SiCl4 pre valve closed
6/26/2012	8:38:25 AM	SiCl4 post valve closed
6/26/2012	8:38:25 AM	Main Vac valve closed
6/26/2012	8:38:25 AM	Bubbler valve closed
6/26/2012	8:38:25 AM	Bypass valve opened
6/26/2012	8:38:25 AM	Helium MFC set to  0.000000
6/26/2012	8:38:25 AM	H2 MFC set to  0.000000
6/26/2012	8:38:25 AM	BCl3 MFC set to  0.000000
6/26/2012	8:38:25 AM	PH3 MFC set to  0.000000
6/26/2012	8:38:25 AM	SiCl4 MFC set to  0.000000
6/26/2012	8:38:25 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	8:38:25 AM	Tube furnace set to 0
6/26/2012	8:39:25 AM	Helium valve closed
6/26/2012	8:39:25 AM	H2 valve closed
6/26/2012	8:39:25 AM	BCl3 valve closed
6/26/2012	8:39:25 AM	PH3 valve closed
6/26/2012	8:39:25 AM	SiCl4 pre valve closed
6/26/2012	8:39:25 AM	SiCl4 post valve closed
6/26/2012	8:39:25 AM	Bypass valve closed
6/26/2012	8:39:25 AM	Bubbler valve closed
6/26/2012	8:39:25 AM	Main Vac valve opened
6/26/2012	8:39:25 AM	Helium MFC set to  0.000000
6/26/2012	8:39:25 AM	H2 MFC set to  0.000000
6/26/2012	8:39:25 AM	BCl3 MFC set to  0.000000
6/26/2012	8:39:25 AM	PH3 MFC set to  0.000000
6/26/2012	8:39:25 AM	SiCl4 MFC set to  0.000000
6/26/2012	8:39:25 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	8:39:26 AM	Tube furnace set to 0
6/26/2012	8:39:27 AM	Run finished at 8:39 AM
6/26/2012	8:39:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	10:07:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	10:07:10 AM	Recipe started at 10:07 AM
6/26/2012	10:07:10 AM	Helium valve closed
6/26/2012	10:07:10 AM	H2 valve closed
6/26/2012	10:07:10 AM	BCl3 valve closed
6/26/2012	10:07:10 AM	PH3 valve closed
6/26/2012	10:07:10 AM	SiCl4 pre valve closed
6/26/2012	10:07:10 AM	SiCl4 post valve closed
6/26/2012	10:07:10 AM	Main Vac valve closed
6/26/2012	10:07:10 AM	Bypass valve closed
6/26/2012	10:07:10 AM	Bubbler valve closed
6/26/2012	10:07:10 AM	Helium MFC set to  0.000000
6/26/2012	10:07:10 AM	H2 MFC set to  0.000000
6/26/2012	10:07:10 AM	BCl3 MFC set to  0.000000
6/26/2012	10:07:10 AM	PH3 MFC set to  0.000000
6/26/2012	10:07:10 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:07:10 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:07:11 AM	Tube furnace set to 0
6/26/2012	10:07:14 AM	H2 valve closed
6/26/2012	10:07:14 AM	BCl3 valve closed
6/26/2012	10:07:14 AM	PH3 valve closed
6/26/2012	10:07:14 AM	SiCl4 pre valve closed
6/26/2012	10:07:14 AM	SiCl4 post valve closed
6/26/2012	10:07:14 AM	Main Vac valve closed
6/26/2012	10:07:14 AM	Bypass valve closed
6/26/2012	10:07:14 AM	Bubbler valve closed
6/26/2012	10:07:14 AM	Helium valve opened
6/26/2012	10:07:14 AM	Helium MFC set to  500.000000
6/26/2012	10:07:14 AM	H2 MFC set to  0.000000
6/26/2012	10:07:14 AM	BCl3 MFC set to  0.000000
6/26/2012	10:07:14 AM	PH3 MFC set to  0.000000
6/26/2012	10:07:14 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:07:14 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:07:14 AM	Tube furnace set to 0
6/26/2012	10:08:27 AM	Helium valve closed
6/26/2012	10:08:27 AM	H2 valve closed
6/26/2012	10:08:27 AM	BCl3 valve closed
6/26/2012	10:08:27 AM	PH3 valve closed
6/26/2012	10:08:27 AM	SiCl4 pre valve closed
6/26/2012	10:08:27 AM	SiCl4 post valve closed
6/26/2012	10:08:27 AM	Main Vac valve closed
6/26/2012	10:08:27 AM	Bypass valve closed
6/26/2012	10:08:27 AM	Bubbler valve closed
6/26/2012	10:08:27 AM	Helium MFC set to  0.000000
6/26/2012	10:08:27 AM	H2 MFC set to  0.000000
6/26/2012	10:08:27 AM	BCl3 MFC set to  0.000000
6/26/2012	10:08:27 AM	PH3 MFC set to  0.000000
6/26/2012	10:08:27 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:08:27 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:08:27 AM	Tube furnace set to 0
6/26/2012	10:08:28 AM	Run finished at 10:08 AM
6/26/2012	10:08:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	10:11:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	10:11:08 AM	Recipe started at 10:11 AM
6/26/2012	10:11:08 AM	Helium valve closed
6/26/2012	10:11:08 AM	H2 valve closed
6/26/2012	10:11:08 AM	BCl3 valve closed
6/26/2012	10:11:08 AM	PH3 valve closed
6/26/2012	10:11:08 AM	SiCl4 pre valve closed
6/26/2012	10:11:08 AM	SiCl4 post valve closed
6/26/2012	10:11:08 AM	Main Vac valve closed
6/26/2012	10:11:09 AM	Bubbler valve closed
6/26/2012	10:11:09 AM	Bypass valve opened
6/26/2012	10:11:09 AM	Helium MFC set to  0.000000
6/26/2012	10:11:09 AM	H2 MFC set to  0.000000
6/26/2012	10:11:09 AM	BCl3 MFC set to  0.000000
6/26/2012	10:11:09 AM	PH3 MFC set to  0.000000
6/26/2012	10:11:09 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:11:09 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:11:09 AM	Tube furnace set to 0
6/26/2012	10:12:15 AM	Helium valve closed
6/26/2012	10:12:15 AM	H2 valve closed
6/26/2012	10:12:15 AM	BCl3 valve closed
6/26/2012	10:12:15 AM	PH3 valve closed
6/26/2012	10:12:15 AM	SiCl4 pre valve closed
6/26/2012	10:12:15 AM	SiCl4 post valve closed
6/26/2012	10:12:15 AM	Main Vac valve closed
6/26/2012	10:12:15 AM	Bubbler valve closed
6/26/2012	10:12:15 AM	Bypass valve opened
6/26/2012	10:12:15 AM	Helium MFC set to  0.000000
6/26/2012	10:12:15 AM	H2 MFC set to  0.000000
6/26/2012	10:12:15 AM	BCl3 MFC set to  0.000000
6/26/2012	10:12:15 AM	PH3 MFC set to  0.000000
6/26/2012	10:12:15 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:12:15 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:12:15 AM	Tube furnace set to 0
6/26/2012	10:13:15 AM	Helium valve closed
6/26/2012	10:13:15 AM	H2 valve closed
6/26/2012	10:13:15 AM	BCl3 valve closed
6/26/2012	10:13:15 AM	PH3 valve closed
6/26/2012	10:13:15 AM	SiCl4 pre valve closed
6/26/2012	10:13:15 AM	SiCl4 post valve closed
6/26/2012	10:13:15 AM	Bypass valve closed
6/26/2012	10:13:15 AM	Bubbler valve closed
6/26/2012	10:13:15 AM	Main Vac valve opened
6/26/2012	10:13:15 AM	Helium MFC set to  0.000000
6/26/2012	10:13:15 AM	H2 MFC set to  0.000000
6/26/2012	10:13:15 AM	BCl3 MFC set to  0.000000
6/26/2012	10:13:15 AM	PH3 MFC set to  0.000000
6/26/2012	10:13:15 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:13:15 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:13:15 AM	Tube furnace set to 0
6/26/2012	10:13:16 AM	Run finished at 10:13 AM
6/26/2012	10:13:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	10:13:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	10:13:25 AM	Recipe started at 10:13 AM
6/26/2012	10:13:25 AM	Helium valve closed
6/26/2012	10:13:25 AM	H2 valve closed
6/26/2012	10:13:25 AM	BCl3 valve closed
6/26/2012	10:13:25 AM	PH3 valve closed
6/26/2012	10:13:25 AM	SiCl4 pre valve closed
6/26/2012	10:13:25 AM	SiCl4 post valve closed
6/26/2012	10:13:25 AM	Main Vac valve closed
6/26/2012	10:13:25 AM	Bypass valve closed
6/26/2012	10:13:25 AM	Bubbler valve closed
6/26/2012	10:13:25 AM	Helium MFC set to  0.000000
6/26/2012	10:13:25 AM	H2 MFC set to  0.000000
6/26/2012	10:13:25 AM	BCl3 MFC set to  0.000000
6/26/2012	10:13:25 AM	PH3 MFC set to  0.000000
6/26/2012	10:13:25 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:13:25 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:13:25 AM	Tube furnace set to 0
6/26/2012	10:13:28 AM	H2 valve closed
6/26/2012	10:13:28 AM	BCl3 valve closed
6/26/2012	10:13:28 AM	PH3 valve closed
6/26/2012	10:13:28 AM	SiCl4 pre valve closed
6/26/2012	10:13:28 AM	SiCl4 post valve closed
6/26/2012	10:13:28 AM	Main Vac valve closed
6/26/2012	10:13:28 AM	Bypass valve closed
6/26/2012	10:13:28 AM	Bubbler valve closed
6/26/2012	10:13:28 AM	Helium valve opened
6/26/2012	10:13:28 AM	Helium MFC set to  500.000000
6/26/2012	10:13:28 AM	H2 MFC set to  0.000000
6/26/2012	10:13:28 AM	BCl3 MFC set to  0.000000
6/26/2012	10:13:28 AM	PH3 MFC set to  0.000000
6/26/2012	10:13:28 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:13:28 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:13:29 AM	Tube furnace set to 0
6/26/2012	10:14:43 AM	Helium valve closed
6/26/2012	10:14:43 AM	H2 valve closed
6/26/2012	10:14:43 AM	BCl3 valve closed
6/26/2012	10:14:43 AM	PH3 valve closed
6/26/2012	10:14:43 AM	SiCl4 pre valve closed
6/26/2012	10:14:43 AM	SiCl4 post valve closed
6/26/2012	10:14:43 AM	Main Vac valve closed
6/26/2012	10:14:43 AM	Bypass valve closed
6/26/2012	10:14:43 AM	Bubbler valve closed
6/26/2012	10:14:43 AM	Helium MFC set to  0.000000
6/26/2012	10:14:43 AM	H2 MFC set to  0.000000
6/26/2012	10:14:43 AM	BCl3 MFC set to  0.000000
6/26/2012	10:14:43 AM	PH3 MFC set to  0.000000
6/26/2012	10:14:43 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:14:43 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:14:43 AM	Tube furnace set to 0
6/26/2012	10:14:44 AM	Run finished at 10:14 AM
6/26/2012	10:14:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	10:19:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	10:19:41 AM	Recipe started at 10:19 AM
6/26/2012	10:19:41 AM	Helium valve closed
6/26/2012	10:19:41 AM	H2 valve closed
6/26/2012	10:19:41 AM	BCl3 valve closed
6/26/2012	10:19:41 AM	PH3 valve closed
6/26/2012	10:19:41 AM	SiCl4 pre valve closed
6/26/2012	10:19:41 AM	SiCl4 post valve closed
6/26/2012	10:19:41 AM	Main Vac valve closed
6/26/2012	10:19:41 AM	Bubbler valve closed
6/26/2012	10:19:42 AM	Bypass valve opened
6/26/2012	10:19:42 AM	Helium MFC set to  0.000000
6/26/2012	10:19:42 AM	H2 MFC set to  0.000000
6/26/2012	10:19:42 AM	BCl3 MFC set to  0.000000
6/26/2012	10:19:42 AM	PH3 MFC set to  0.000000
6/26/2012	10:19:42 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:19:42 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:19:42 AM	Tube furnace set to 0
6/26/2012	10:20:50 AM	Helium valve closed
6/26/2012	10:20:50 AM	H2 valve closed
6/26/2012	10:20:50 AM	BCl3 valve closed
6/26/2012	10:20:50 AM	PH3 valve closed
6/26/2012	10:20:50 AM	SiCl4 pre valve closed
6/26/2012	10:20:50 AM	SiCl4 post valve closed
6/26/2012	10:20:50 AM	Main Vac valve closed
6/26/2012	10:20:50 AM	Bubbler valve closed
6/26/2012	10:20:50 AM	Bypass valve opened
6/26/2012	10:20:50 AM	Helium MFC set to  0.000000
6/26/2012	10:20:50 AM	H2 MFC set to  0.000000
6/26/2012	10:20:50 AM	BCl3 MFC set to  0.000000
6/26/2012	10:20:50 AM	PH3 MFC set to  0.000000
6/26/2012	10:20:50 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:20:50 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:20:50 AM	Tube furnace set to 0
6/26/2012	10:21:50 AM	Helium valve closed
6/26/2012	10:21:50 AM	H2 valve closed
6/26/2012	10:21:50 AM	BCl3 valve closed
6/26/2012	10:21:50 AM	PH3 valve closed
6/26/2012	10:21:50 AM	SiCl4 pre valve closed
6/26/2012	10:21:50 AM	SiCl4 post valve closed
6/26/2012	10:21:50 AM	Bypass valve closed
6/26/2012	10:21:50 AM	Bubbler valve closed
6/26/2012	10:21:50 AM	Main Vac valve opened
6/26/2012	10:21:50 AM	Helium MFC set to  0.000000
6/26/2012	10:21:50 AM	H2 MFC set to  0.000000
6/26/2012	10:21:50 AM	BCl3 MFC set to  0.000000
6/26/2012	10:21:50 AM	PH3 MFC set to  0.000000
6/26/2012	10:21:50 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:21:50 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:21:50 AM	Tube furnace set to 0
6/26/2012	10:21:51 AM	Run finished at 10:21 AM
6/26/2012	10:21:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	10:46:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/26/2012	10:47:01 AM	Recipe started at 10:46 AM
6/26/2012	10:47:01 AM	Helium valve closed
6/26/2012	10:47:01 AM	H2 valve closed
6/26/2012	10:47:01 AM	BCl3 valve closed
6/26/2012	10:47:01 AM	PH3 valve closed
6/26/2012	10:47:01 AM	SiCl4 pre valve closed
6/26/2012	10:47:01 AM	SiCl4 post valve closed
6/26/2012	10:47:01 AM	Main Vac valve closed
6/26/2012	10:47:01 AM	Bubbler valve closed
6/26/2012	10:47:01 AM	Bypass valve opened
6/26/2012	10:47:01 AM	Helium MFC set to  0.000000
6/26/2012	10:47:01 AM	H2 MFC set to  0.000000
6/26/2012	10:47:01 AM	BCl3 MFC set to  0.000000
6/26/2012	10:47:01 AM	PH3 MFC set to  0.000000
6/26/2012	10:47:01 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:47:01 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:47:01 AM	Tube furnace set to 0
6/26/2012	10:47:01 AM	Helium valve closed
6/26/2012	10:47:01 AM	H2 valve closed
6/26/2012	10:47:01 AM	BCl3 valve closed
6/26/2012	10:47:01 AM	PH3 valve closed
6/26/2012	10:47:01 AM	SiCl4 pre valve closed
6/26/2012	10:47:01 AM	SiCl4 post valve closed
6/26/2012	10:47:01 AM	Main Vac valve closed
6/26/2012	10:47:01 AM	Bubbler valve closed
6/26/2012	10:47:01 AM	Bypass valve opened
6/26/2012	10:47:02 AM	Helium MFC set to  0.000000
6/26/2012	10:47:02 AM	H2 MFC set to  0.000000
6/26/2012	10:47:02 AM	BCl3 MFC set to  0.000000
6/26/2012	10:47:02 AM	PH3 MFC set to  0.000000
6/26/2012	10:47:02 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:47:02 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:47:02 AM	Tube furnace set to 0
6/26/2012	10:47:03 AM	Helium valve closed
6/26/2012	10:47:03 AM	H2 valve closed
6/26/2012	10:47:03 AM	BCl3 valve closed
6/26/2012	10:47:03 AM	PH3 valve closed
6/26/2012	10:47:03 AM	SiCl4 pre valve closed
6/26/2012	10:47:03 AM	SiCl4 post valve closed
6/26/2012	10:47:03 AM	Bypass valve closed
6/26/2012	10:47:03 AM	Bubbler valve closed
6/26/2012	10:47:03 AM	Main Vac valve opened
6/26/2012	10:47:03 AM	Helium MFC set to  0.000000
6/26/2012	10:47:03 AM	H2 MFC set to  0.000000
6/26/2012	10:47:03 AM	BCl3 MFC set to  0.000000
6/26/2012	10:47:03 AM	PH3 MFC set to  0.000000
6/26/2012	10:47:03 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:47:03 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:47:03 AM	Tube furnace set to 0
6/26/2012	10:47:04 AM	H2 valve closed
6/26/2012	10:47:04 AM	BCl3 valve closed
6/26/2012	10:47:04 AM	PH3 valve closed
6/26/2012	10:47:04 AM	SiCl4 pre valve closed
6/26/2012	10:47:04 AM	SiCl4 post valve closed
6/26/2012	10:47:04 AM	Bypass valve closed
6/26/2012	10:47:04 AM	Bubbler valve closed
6/26/2012	10:47:04 AM	Helium valve opened
6/26/2012	10:47:04 AM	Main Vac valve opened
6/26/2012	10:47:04 AM	Helium MFC set to  20.000000
6/26/2012	10:47:04 AM	H2 MFC set to  0.000000
6/26/2012	10:47:04 AM	BCl3 MFC set to  0.000000
6/26/2012	10:47:04 AM	PH3 MFC set to  0.000000
6/26/2012	10:47:04 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:47:04 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:47:05 AM	Tube furnace set to 0
6/26/2012	10:47:35 AM	Helium valve closed
6/26/2012	10:47:35 AM	H2 valve closed
6/26/2012	10:47:35 AM	BCl3 valve closed
6/26/2012	10:47:35 AM	PH3 valve closed
6/26/2012	10:47:35 AM	SiCl4 pre valve closed
6/26/2012	10:47:35 AM	SiCl4 post valve closed
6/26/2012	10:47:35 AM	Bypass valve closed
6/26/2012	10:47:35 AM	Bubbler valve closed
6/26/2012	10:47:35 AM	Main Vac valve opened
6/26/2012	10:47:35 AM	Helium MFC set to  0.000000
6/26/2012	10:47:35 AM	H2 MFC set to  0.000000
6/26/2012	10:47:35 AM	BCl3 MFC set to  0.000000
6/26/2012	10:47:35 AM	PH3 MFC set to  0.000000
6/26/2012	10:47:35 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:47:35 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:47:35 AM	Tube furnace set to 0
6/26/2012	10:48:05 AM	H2 valve closed
6/26/2012	10:48:05 AM	BCl3 valve closed
6/26/2012	10:48:05 AM	PH3 valve closed
6/26/2012	10:48:05 AM	SiCl4 pre valve closed
6/26/2012	10:48:05 AM	SiCl4 post valve closed
6/26/2012	10:48:05 AM	Bypass valve closed
6/26/2012	10:48:05 AM	Bubbler valve closed
6/26/2012	10:48:05 AM	Helium valve opened
6/26/2012	10:48:05 AM	Main Vac valve opened
6/26/2012	10:48:05 AM	Helium MFC set to  20.000000
6/26/2012	10:48:05 AM	H2 MFC set to  0.000000
6/26/2012	10:48:05 AM	BCl3 MFC set to  0.000000
6/26/2012	10:48:05 AM	PH3 MFC set to  0.000000
6/26/2012	10:48:05 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:48:05 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:48:05 AM	Tube furnace set to 0
6/26/2012	10:48:35 AM	Helium valve closed
6/26/2012	10:48:35 AM	H2 valve closed
6/26/2012	10:48:35 AM	BCl3 valve closed
6/26/2012	10:48:35 AM	PH3 valve closed
6/26/2012	10:48:35 AM	SiCl4 pre valve closed
6/26/2012	10:48:35 AM	SiCl4 post valve closed
6/26/2012	10:48:35 AM	Bypass valve closed
6/26/2012	10:48:35 AM	Bubbler valve closed
6/26/2012	10:48:35 AM	Main Vac valve opened
6/26/2012	10:48:35 AM	Helium MFC set to  0.000000
6/26/2012	10:48:35 AM	H2 MFC set to  0.000000
6/26/2012	10:48:35 AM	BCl3 MFC set to  0.000000
6/26/2012	10:48:35 AM	PH3 MFC set to  0.000000
6/26/2012	10:48:35 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:48:35 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:48:35 AM	Tube furnace set to 0
6/26/2012	10:49:05 AM	H2 valve closed
6/26/2012	10:49:05 AM	BCl3 valve closed
6/26/2012	10:49:05 AM	PH3 valve closed
6/26/2012	10:49:05 AM	SiCl4 pre valve closed
6/26/2012	10:49:05 AM	SiCl4 post valve closed
6/26/2012	10:49:05 AM	Bypass valve closed
6/26/2012	10:49:05 AM	Bubbler valve closed
6/26/2012	10:49:05 AM	Helium valve opened
6/26/2012	10:49:05 AM	Main Vac valve opened
6/26/2012	10:49:05 AM	Helium MFC set to  20.000000
6/26/2012	10:49:05 AM	H2 MFC set to  0.000000
6/26/2012	10:49:05 AM	BCl3 MFC set to  0.000000
6/26/2012	10:49:05 AM	PH3 MFC set to  0.000000
6/26/2012	10:49:05 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:49:05 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:49:06 AM	Tube furnace set to 0
6/26/2012	10:49:36 AM	Helium valve closed
6/26/2012	10:49:36 AM	H2 valve closed
6/26/2012	10:49:36 AM	BCl3 valve closed
6/26/2012	10:49:36 AM	PH3 valve closed
6/26/2012	10:49:36 AM	SiCl4 pre valve closed
6/26/2012	10:49:36 AM	SiCl4 post valve closed
6/26/2012	10:49:36 AM	Bypass valve closed
6/26/2012	10:49:36 AM	Bubbler valve closed
6/26/2012	10:49:36 AM	Main Vac valve opened
6/26/2012	10:49:36 AM	Helium MFC set to  0.000000
6/26/2012	10:49:36 AM	H2 MFC set to  0.000000
6/26/2012	10:49:36 AM	BCl3 MFC set to  0.000000
6/26/2012	10:49:36 AM	PH3 MFC set to  0.000000
6/26/2012	10:49:36 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:49:36 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:49:36 AM	Tube furnace set to 0
6/26/2012	10:50:06 AM	H2 valve closed
6/26/2012	10:50:06 AM	BCl3 valve closed
6/26/2012	10:50:06 AM	PH3 valve closed
6/26/2012	10:50:06 AM	SiCl4 pre valve closed
6/26/2012	10:50:06 AM	SiCl4 post valve closed
6/26/2012	10:50:06 AM	Bypass valve closed
6/26/2012	10:50:06 AM	Bubbler valve closed
6/26/2012	10:50:06 AM	Helium valve opened
6/26/2012	10:50:06 AM	Main Vac valve opened
6/26/2012	10:50:06 AM	Helium MFC set to  20.000000
6/26/2012	10:50:06 AM	H2 MFC set to  0.000000
6/26/2012	10:50:06 AM	BCl3 MFC set to  0.000000
6/26/2012	10:50:06 AM	PH3 MFC set to  0.000000
6/26/2012	10:50:06 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:50:06 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:50:06 AM	Tube furnace set to 0
6/26/2012	10:50:36 AM	Helium valve closed
6/26/2012	10:50:36 AM	H2 valve closed
6/26/2012	10:50:36 AM	BCl3 valve closed
6/26/2012	10:50:36 AM	PH3 valve closed
6/26/2012	10:50:36 AM	SiCl4 pre valve closed
6/26/2012	10:50:36 AM	SiCl4 post valve closed
6/26/2012	10:50:36 AM	Bypass valve closed
6/26/2012	10:50:36 AM	Bubbler valve closed
6/26/2012	10:50:36 AM	Main Vac valve opened
6/26/2012	10:50:36 AM	Helium MFC set to  0.000000
6/26/2012	10:50:36 AM	H2 MFC set to  0.000000
6/26/2012	10:50:36 AM	BCl3 MFC set to  0.000000
6/26/2012	10:50:36 AM	PH3 MFC set to  0.000000
6/26/2012	10:50:36 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:50:36 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:50:36 AM	Tube furnace set to 0
6/26/2012	10:51:06 AM	H2 valve closed
6/26/2012	10:51:06 AM	BCl3 valve closed
6/26/2012	10:51:06 AM	PH3 valve closed
6/26/2012	10:51:06 AM	SiCl4 pre valve closed
6/26/2012	10:51:06 AM	SiCl4 post valve closed
6/26/2012	10:51:06 AM	Bypass valve closed
6/26/2012	10:51:06 AM	Bubbler valve closed
6/26/2012	10:51:06 AM	Helium valve opened
6/26/2012	10:51:06 AM	Main Vac valve opened
6/26/2012	10:51:06 AM	Helium MFC set to  20.000000
6/26/2012	10:51:06 AM	H2 MFC set to  0.000000
6/26/2012	10:51:06 AM	BCl3 MFC set to  0.000000
6/26/2012	10:51:06 AM	PH3 MFC set to  0.000000
6/26/2012	10:51:06 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:51:06 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:51:07 AM	Tube furnace set to 0
6/26/2012	10:51:37 AM	Helium valve closed
6/26/2012	10:51:37 AM	H2 valve closed
6/26/2012	10:51:37 AM	BCl3 valve closed
6/26/2012	10:51:37 AM	PH3 valve closed
6/26/2012	10:51:37 AM	SiCl4 pre valve closed
6/26/2012	10:51:37 AM	SiCl4 post valve closed
6/26/2012	10:51:37 AM	Bypass valve closed
6/26/2012	10:51:37 AM	Bubbler valve closed
6/26/2012	10:51:37 AM	Main Vac valve opened
6/26/2012	10:51:37 AM	Helium MFC set to  0.000000
6/26/2012	10:51:37 AM	H2 MFC set to  0.000000
6/26/2012	10:51:37 AM	BCl3 MFC set to  0.000000
6/26/2012	10:51:37 AM	PH3 MFC set to  0.000000
6/26/2012	10:51:37 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:51:37 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:51:37 AM	Tube furnace set to 0
6/26/2012	10:52:07 AM	H2 valve closed
6/26/2012	10:52:07 AM	BCl3 valve closed
6/26/2012	10:52:07 AM	PH3 valve closed
6/26/2012	10:52:07 AM	SiCl4 pre valve closed
6/26/2012	10:52:07 AM	SiCl4 post valve closed
6/26/2012	10:52:07 AM	Bypass valve closed
6/26/2012	10:52:07 AM	Bubbler valve closed
6/26/2012	10:52:07 AM	Helium valve opened
6/26/2012	10:52:07 AM	Main Vac valve opened
6/26/2012	10:52:07 AM	Helium MFC set to  20.000000
6/26/2012	10:52:07 AM	H2 MFC set to  0.000000
6/26/2012	10:52:07 AM	BCl3 MFC set to  0.000000
6/26/2012	10:52:07 AM	PH3 MFC set to  0.000000
6/26/2012	10:52:07 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:52:07 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:52:07 AM	Tube furnace set to 0
6/26/2012	10:52:37 AM	Helium valve closed
6/26/2012	10:52:37 AM	H2 valve closed
6/26/2012	10:52:37 AM	BCl3 valve closed
6/26/2012	10:52:37 AM	PH3 valve closed
6/26/2012	10:52:37 AM	SiCl4 pre valve closed
6/26/2012	10:52:37 AM	SiCl4 post valve closed
6/26/2012	10:52:37 AM	Bypass valve closed
6/26/2012	10:52:37 AM	Bubbler valve closed
6/26/2012	10:52:37 AM	Main Vac valve opened
6/26/2012	10:52:37 AM	Helium MFC set to  0.000000
6/26/2012	10:52:37 AM	H2 MFC set to  0.000000
6/26/2012	10:52:37 AM	BCl3 MFC set to  0.000000
6/26/2012	10:52:37 AM	PH3 MFC set to  0.000000
6/26/2012	10:52:37 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:52:37 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:52:37 AM	Tube furnace set to 0
6/26/2012	10:53:07 AM	H2 valve closed
6/26/2012	10:53:07 AM	BCl3 valve closed
6/26/2012	10:53:07 AM	PH3 valve closed
6/26/2012	10:53:07 AM	SiCl4 pre valve closed
6/26/2012	10:53:07 AM	SiCl4 post valve closed
6/26/2012	10:53:07 AM	Bypass valve closed
6/26/2012	10:53:07 AM	Bubbler valve closed
6/26/2012	10:53:07 AM	Helium valve opened
6/26/2012	10:53:07 AM	Main Vac valve opened
6/26/2012	10:53:07 AM	Helium MFC set to  20.000000
6/26/2012	10:53:07 AM	H2 MFC set to  0.000000
6/26/2012	10:53:07 AM	BCl3 MFC set to  0.000000
6/26/2012	10:53:07 AM	PH3 MFC set to  0.000000
6/26/2012	10:53:07 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:53:07 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:53:07 AM	Tube furnace set to 0
6/26/2012	10:53:38 AM	Helium valve closed
6/26/2012	10:53:38 AM	H2 valve closed
6/26/2012	10:53:38 AM	BCl3 valve closed
6/26/2012	10:53:38 AM	PH3 valve closed
6/26/2012	10:53:38 AM	SiCl4 pre valve closed
6/26/2012	10:53:38 AM	SiCl4 post valve closed
6/26/2012	10:53:38 AM	Bypass valve closed
6/26/2012	10:53:38 AM	Bubbler valve closed
6/26/2012	10:53:38 AM	Main Vac valve opened
6/26/2012	10:53:38 AM	Helium MFC set to  0.000000
6/26/2012	10:53:38 AM	H2 MFC set to  0.000000
6/26/2012	10:53:38 AM	BCl3 MFC set to  0.000000
6/26/2012	10:53:38 AM	PH3 MFC set to  0.000000
6/26/2012	10:53:38 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:53:38 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:53:38 AM	Tube furnace set to 0
6/26/2012	10:54:08 AM	H2 valve closed
6/26/2012	10:54:08 AM	BCl3 valve closed
6/26/2012	10:54:08 AM	PH3 valve closed
6/26/2012	10:54:08 AM	SiCl4 pre valve closed
6/26/2012	10:54:08 AM	SiCl4 post valve closed
6/26/2012	10:54:08 AM	Bypass valve closed
6/26/2012	10:54:08 AM	Bubbler valve closed
6/26/2012	10:54:08 AM	Helium valve opened
6/26/2012	10:54:08 AM	Main Vac valve opened
6/26/2012	10:54:08 AM	Helium MFC set to  20.000000
6/26/2012	10:54:08 AM	H2 MFC set to  0.000000
6/26/2012	10:54:08 AM	BCl3 MFC set to  0.000000
6/26/2012	10:54:08 AM	PH3 MFC set to  0.000000
6/26/2012	10:54:08 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:54:08 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:54:08 AM	Tube furnace set to 0
6/26/2012	10:54:38 AM	Helium valve closed
6/26/2012	10:54:38 AM	H2 valve closed
6/26/2012	10:54:38 AM	BCl3 valve closed
6/26/2012	10:54:38 AM	PH3 valve closed
6/26/2012	10:54:38 AM	SiCl4 pre valve closed
6/26/2012	10:54:38 AM	SiCl4 post valve closed
6/26/2012	10:54:38 AM	Bypass valve closed
6/26/2012	10:54:38 AM	Bubbler valve closed
6/26/2012	10:54:38 AM	Main Vac valve opened
6/26/2012	10:54:38 AM	Helium MFC set to  0.000000
6/26/2012	10:54:38 AM	H2 MFC set to  0.000000
6/26/2012	10:54:38 AM	BCl3 MFC set to  0.000000
6/26/2012	10:54:38 AM	PH3 MFC set to  0.000000
6/26/2012	10:54:38 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:54:38 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:54:38 AM	Tube furnace set to 0
6/26/2012	10:55:08 AM	H2 valve closed
6/26/2012	10:55:08 AM	BCl3 valve closed
6/26/2012	10:55:08 AM	PH3 valve closed
6/26/2012	10:55:08 AM	SiCl4 pre valve closed
6/26/2012	10:55:08 AM	SiCl4 post valve closed
6/26/2012	10:55:08 AM	Bypass valve closed
6/26/2012	10:55:08 AM	Bubbler valve closed
6/26/2012	10:55:08 AM	Helium valve opened
6/26/2012	10:55:08 AM	Main Vac valve opened
6/26/2012	10:55:08 AM	Helium MFC set to  20.000000
6/26/2012	10:55:08 AM	H2 MFC set to  0.000000
6/26/2012	10:55:08 AM	BCl3 MFC set to  0.000000
6/26/2012	10:55:08 AM	PH3 MFC set to  0.000000
6/26/2012	10:55:08 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:55:08 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:55:08 AM	Tube furnace set to 0
6/26/2012	10:55:38 AM	Helium valve closed
6/26/2012	10:55:38 AM	H2 valve closed
6/26/2012	10:55:38 AM	BCl3 valve closed
6/26/2012	10:55:38 AM	PH3 valve closed
6/26/2012	10:55:38 AM	SiCl4 pre valve closed
6/26/2012	10:55:38 AM	SiCl4 post valve closed
6/26/2012	10:55:38 AM	Bypass valve closed
6/26/2012	10:55:38 AM	Bubbler valve closed
6/26/2012	10:55:38 AM	Main Vac valve opened
6/26/2012	10:55:38 AM	Helium MFC set to  0.000000
6/26/2012	10:55:39 AM	H2 MFC set to  0.000000
6/26/2012	10:55:39 AM	BCl3 MFC set to  0.000000
6/26/2012	10:55:39 AM	PH3 MFC set to  0.000000
6/26/2012	10:55:39 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:55:39 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:55:39 AM	Tube furnace set to 0
6/26/2012	10:56:09 AM	H2 valve closed
6/26/2012	10:56:09 AM	BCl3 valve closed
6/26/2012	10:56:09 AM	PH3 valve closed
6/26/2012	10:56:09 AM	SiCl4 pre valve closed
6/26/2012	10:56:09 AM	SiCl4 post valve closed
6/26/2012	10:56:09 AM	Bypass valve closed
6/26/2012	10:56:09 AM	Bubbler valve closed
6/26/2012	10:56:09 AM	Helium valve opened
6/26/2012	10:56:09 AM	Main Vac valve opened
6/26/2012	10:56:09 AM	Helium MFC set to  20.000000
6/26/2012	10:56:09 AM	H2 MFC set to  0.000000
6/26/2012	10:56:09 AM	BCl3 MFC set to  0.000000
6/26/2012	10:56:09 AM	PH3 MFC set to  0.000000
6/26/2012	10:56:09 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:56:09 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:56:09 AM	Tube furnace set to 0
6/26/2012	10:56:39 AM	Helium valve closed
6/26/2012	10:56:39 AM	H2 valve closed
6/26/2012	10:56:39 AM	BCl3 valve closed
6/26/2012	10:56:39 AM	PH3 valve closed
6/26/2012	10:56:39 AM	SiCl4 pre valve closed
6/26/2012	10:56:39 AM	SiCl4 post valve closed
6/26/2012	10:56:39 AM	Bypass valve closed
6/26/2012	10:56:39 AM	Bubbler valve closed
6/26/2012	10:56:39 AM	Main Vac valve opened
6/26/2012	10:56:39 AM	Helium MFC set to  0.000000
6/26/2012	10:56:39 AM	H2 MFC set to  0.000000
6/26/2012	10:56:39 AM	BCl3 MFC set to  0.000000
6/26/2012	10:56:39 AM	PH3 MFC set to  0.000000
6/26/2012	10:56:39 AM	SiCl4 MFC set to  0.000000
6/26/2012	10:56:39 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	10:56:39 AM	Tube furnace set to 0
6/26/2012	10:56:40 AM	Run finished at 10:56 AM
6/26/2012	10:56:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/26/2012	11:10:10 AM	Recipe started at 11:10 AM
6/26/2012	11:10:10 AM	Helium valve closed
6/26/2012	11:10:10 AM	H2 valve closed
6/26/2012	11:10:10 AM	BCl3 valve closed
6/26/2012	11:10:10 AM	PH3 valve closed
6/26/2012	11:10:10 AM	SiCl4 pre valve closed
6/26/2012	11:10:10 AM	SiCl4 post valve closed
6/26/2012	11:10:10 AM	Main Vac valve closed
6/26/2012	11:10:10 AM	Bypass valve closed
6/26/2012	11:10:10 AM	Bubbler valve closed
6/26/2012	11:10:10 AM	Helium MFC set to  0.000000
6/26/2012	11:10:10 AM	H2 MFC set to  0.000000
6/26/2012	11:10:10 AM	BCl3 MFC set to  0.000000
6/26/2012	11:10:10 AM	PH3 MFC set to  0.000000
6/26/2012	11:10:10 AM	SiCl4 MFC set to  0.000000
6/26/2012	11:10:10 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:10:10 AM	Tube furnace set to 0
6/26/2012	11:10:13 AM	Helium valve closed
6/26/2012	11:10:13 AM	BCl3 valve closed
6/26/2012	11:10:13 AM	PH3 valve closed
6/26/2012	11:10:13 AM	SiCl4 pre valve closed
6/26/2012	11:10:13 AM	SiCl4 post valve closed
6/26/2012	11:10:13 AM	Main Vac valve closed
6/26/2012	11:10:13 AM	Bypass valve closed
6/26/2012	11:10:13 AM	Bubbler valve closed
6/26/2012	11:10:13 AM	H2 valve opened
6/26/2012	11:10:13 AM	Helium MFC set to  0.000000
6/26/2012	11:10:13 AM	H2 MFC set to  500.000000
6/26/2012	11:10:13 AM	BCl3 MFC set to  0.000000
6/26/2012	11:10:13 AM	PH3 MFC set to  0.000000
6/26/2012	11:10:13 AM	SiCl4 MFC set to  0.000000
6/26/2012	11:10:13 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:10:13 AM	Tube furnace set to 0
6/26/2012	11:11:30 AM	Helium valve closed
6/26/2012	11:11:30 AM	BCl3 valve closed
6/26/2012	11:11:30 AM	PH3 valve closed
6/26/2012	11:11:30 AM	SiCl4 pre valve closed
6/26/2012	11:11:30 AM	SiCl4 post valve closed
6/26/2012	11:11:30 AM	Main Vac valve closed
6/26/2012	11:11:30 AM	Bypass valve closed
6/26/2012	11:11:30 AM	H2 valve opened
6/26/2012	11:11:30 AM	Bubbler valve opened
6/26/2012	11:11:30 AM	Helium MFC set to  0.000000
6/26/2012	11:11:30 AM	H2 MFC set to  500.000000
6/26/2012	11:11:30 AM	BCl3 MFC set to  0.000000
6/26/2012	11:11:30 AM	PH3 MFC set to  0.000000
6/26/2012	11:11:30 AM	SiCl4 MFC set to  0.000000
6/26/2012	11:11:30 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:11:30 AM	Tube furnace set to 0
6/26/2012	11:11:31 AM	Helium valve closed
6/26/2012	11:11:31 AM	BCl3 valve closed
6/26/2012	11:11:31 AM	PH3 valve closed
6/26/2012	11:11:31 AM	SiCl4 pre valve closed
6/26/2012	11:11:31 AM	SiCl4 post valve closed
6/26/2012	11:11:31 AM	Main Vac valve closed
6/26/2012	11:11:31 AM	Bypass valve closed
6/26/2012	11:11:31 AM	H2 valve opened
6/26/2012	11:11:31 AM	Bubbler valve opened
6/26/2012	11:11:31 AM	Helium MFC set to  0.000000
6/26/2012	11:11:31 AM	H2 MFC set to  500.000000
6/26/2012	11:11:31 AM	BCl3 MFC set to  0.000000
6/26/2012	11:11:31 AM	PH3 MFC set to  0.000000
6/26/2012	11:11:31 AM	SiCl4 MFC set to  0.000000
6/26/2012	11:11:31 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:11:32 AM	Tube furnace set to 1000
6/26/2012	11:31:32 AM	Helium valve closed
6/26/2012	11:31:32 AM	PH3 valve closed
6/26/2012	11:31:32 AM	Main Vac valve closed
6/26/2012	11:31:32 AM	Bypass valve closed
6/26/2012	11:31:32 AM	H2 valve opened
6/26/2012	11:31:32 AM	BCl3 valve opened
6/26/2012	11:31:32 AM	SiCl4 pre valve opened
6/26/2012	11:31:32 AM	SiCl4 post valve opened
6/26/2012	11:31:32 AM	Bubbler valve opened
6/26/2012	11:31:32 AM	Helium MFC set to  0.000000
6/26/2012	11:31:32 AM	H2 MFC set to  500.000000
6/26/2012	11:31:32 AM	BCl3 MFC set to  1.000000
6/26/2012	11:31:32 AM	PH3 MFC set to  0.000000
6/26/2012	11:31:32 AM	SiCl4 MFC set to  50.000000
6/26/2012	11:31:32 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:31:32 AM	Tube furnace set to 1000
6/26/2012	11:51:32 AM	Helium valve closed
6/26/2012	11:51:32 AM	BCl3 valve closed
6/26/2012	11:51:32 AM	PH3 valve closed
6/26/2012	11:51:32 AM	SiCl4 pre valve closed
6/26/2012	11:51:32 AM	SiCl4 post valve closed
6/26/2012	11:51:32 AM	Main Vac valve closed
6/26/2012	11:51:32 AM	Bypass valve closed
6/26/2012	11:51:32 AM	H2 valve opened
6/26/2012	11:51:32 AM	Bubbler valve opened
6/26/2012	11:51:32 AM	Helium MFC set to  0.000000
6/26/2012	11:51:32 AM	H2 MFC set to  500.000000
6/26/2012	11:51:32 AM	BCl3 MFC set to  0.000000
6/26/2012	11:51:32 AM	PH3 MFC set to  0.000000
6/26/2012	11:51:32 AM	SiCl4 MFC set to  0.000000
6/26/2012	11:51:32 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:51:32 AM	Tube furnace set to 750
6/26/2012	11:56:32 AM	H2 valve closed
6/26/2012	11:56:32 AM	BCl3 valve closed
6/26/2012	11:56:32 AM	PH3 valve closed
6/26/2012	11:56:32 AM	SiCl4 pre valve closed
6/26/2012	11:56:32 AM	SiCl4 post valve closed
6/26/2012	11:56:32 AM	Main Vac valve closed
6/26/2012	11:56:32 AM	Bypass valve closed
6/26/2012	11:56:32 AM	Helium valve opened
6/26/2012	11:56:32 AM	Bubbler valve opened
6/26/2012	11:56:32 AM	Helium MFC set to  500.000000
6/26/2012	11:56:32 AM	H2 MFC set to  0.000000
6/26/2012	11:56:32 AM	BCl3 MFC set to  0.000000
6/26/2012	11:56:32 AM	PH3 MFC set to  0.000000
6/26/2012	11:56:32 AM	SiCl4 MFC set to  0.000000
6/26/2012	11:56:32 AM	Bypass solenoid MFC set to  0.000000
6/26/2012	11:56:32 AM	Tube furnace set to 0
6/26/2012	12:16:32 PM	Helium valve closed
6/26/2012	12:16:32 PM	H2 valve closed
6/26/2012	12:16:32 PM	BCl3 valve closed
6/26/2012	12:16:32 PM	PH3 valve closed
6/26/2012	12:16:32 PM	SiCl4 pre valve closed
6/26/2012	12:16:32 PM	SiCl4 post valve closed
6/26/2012	12:16:32 PM	Main Vac valve closed
6/26/2012	12:16:32 PM	Bypass valve closed
6/26/2012	12:16:32 PM	Bubbler valve closed
6/26/2012	12:16:32 PM	Helium MFC set to  0.000000
6/26/2012	12:16:32 PM	H2 MFC set to  0.000000
6/26/2012	12:16:32 PM	BCl3 MFC set to  0.000000
6/26/2012	12:16:32 PM	PH3 MFC set to  0.000000
6/26/2012	12:16:32 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:16:32 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:16:33 PM	Tube furnace set to 0
6/26/2012	12:16:34 PM	Run finished at 12:16 PM
6/26/2012	12:28:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	12:28:42 PM	Recipe started at 12:28 PM
6/26/2012	12:28:42 PM	Helium valve closed
6/26/2012	12:28:42 PM	H2 valve closed
6/26/2012	12:28:42 PM	BCl3 valve closed
6/26/2012	12:28:42 PM	PH3 valve closed
6/26/2012	12:28:42 PM	SiCl4 pre valve closed
6/26/2012	12:28:42 PM	SiCl4 post valve closed
6/26/2012	12:28:42 PM	Main Vac valve closed
6/26/2012	12:28:42 PM	Bypass valve closed
6/26/2012	12:28:42 PM	Bubbler valve closed
6/26/2012	12:28:42 PM	Helium MFC set to  0.000000
6/26/2012	12:28:42 PM	H2 MFC set to  0.000000
6/26/2012	12:28:42 PM	BCl3 MFC set to  0.000000
6/26/2012	12:28:42 PM	PH3 MFC set to  0.000000
6/26/2012	12:28:42 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:28:42 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:28:42 PM	Tube furnace set to 0
6/26/2012	12:28:45 PM	H2 valve closed
6/26/2012	12:28:45 PM	BCl3 valve closed
6/26/2012	12:28:45 PM	PH3 valve closed
6/26/2012	12:28:45 PM	SiCl4 pre valve closed
6/26/2012	12:28:45 PM	SiCl4 post valve closed
6/26/2012	12:28:45 PM	Main Vac valve closed
6/26/2012	12:28:45 PM	Bypass valve closed
6/26/2012	12:28:45 PM	Bubbler valve closed
6/26/2012	12:28:45 PM	Helium valve opened
6/26/2012	12:28:45 PM	Helium MFC set to  500.000000
6/26/2012	12:28:45 PM	H2 MFC set to  0.000000
6/26/2012	12:28:45 PM	BCl3 MFC set to  0.000000
6/26/2012	12:28:45 PM	PH3 MFC set to  0.000000
6/26/2012	12:28:45 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:28:45 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:28:45 PM	Tube furnace set to 0
6/26/2012	12:28:47 PM	Helium valve closed
6/26/2012	12:28:47 PM	H2 valve closed
6/26/2012	12:28:47 PM	BCl3 valve closed
6/26/2012	12:28:47 PM	PH3 valve closed
6/26/2012	12:28:47 PM	SiCl4 pre valve closed
6/26/2012	12:28:47 PM	SiCl4 post valve closed
6/26/2012	12:28:47 PM	Main Vac valve closed
6/26/2012	12:28:47 PM	Bypass valve closed
6/26/2012	12:28:47 PM	Bubbler valve closed
6/26/2012	12:28:47 PM	Helium MFC set to  0.000000
6/26/2012	12:28:47 PM	H2 MFC set to  0.000000
6/26/2012	12:28:47 PM	BCl3 MFC set to  0.000000
6/26/2012	12:28:47 PM	PH3 MFC set to  0.000000
6/26/2012	12:28:47 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:28:47 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:28:47 PM	Tube furnace set to 0
6/26/2012	12:28:48 PM	Run finished at 12:28 PM
6/26/2012	12:28:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	12:54:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	12:54:06 PM	Recipe started at 12:54 PM
6/26/2012	12:54:06 PM	Helium valve closed
6/26/2012	12:54:06 PM	H2 valve closed
6/26/2012	12:54:06 PM	BCl3 valve closed
6/26/2012	12:54:06 PM	PH3 valve closed
6/26/2012	12:54:06 PM	SiCl4 pre valve closed
6/26/2012	12:54:06 PM	SiCl4 post valve closed
6/26/2012	12:54:06 PM	Main Vac valve closed
6/26/2012	12:54:06 PM	Bubbler valve closed
6/26/2012	12:54:06 PM	Bypass valve opened
6/26/2012	12:54:06 PM	Helium MFC set to  0.000000
6/26/2012	12:54:06 PM	H2 MFC set to  0.000000
6/26/2012	12:54:06 PM	BCl3 MFC set to  0.000000
6/26/2012	12:54:06 PM	PH3 MFC set to  0.000000
6/26/2012	12:54:06 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:54:06 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:54:06 PM	Tube furnace set to 0
6/26/2012	12:55:24 PM	Helium valve closed
6/26/2012	12:55:24 PM	H2 valve closed
6/26/2012	12:55:24 PM	BCl3 valve closed
6/26/2012	12:55:24 PM	PH3 valve closed
6/26/2012	12:55:24 PM	SiCl4 pre valve closed
6/26/2012	12:55:24 PM	SiCl4 post valve closed
6/26/2012	12:55:24 PM	Main Vac valve closed
6/26/2012	12:55:24 PM	Bubbler valve closed
6/26/2012	12:55:24 PM	Bypass valve opened
6/26/2012	12:55:24 PM	Helium MFC set to  0.000000
6/26/2012	12:55:24 PM	H2 MFC set to  0.000000
6/26/2012	12:55:24 PM	BCl3 MFC set to  0.000000
6/26/2012	12:55:24 PM	PH3 MFC set to  0.000000
6/26/2012	12:55:24 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:55:24 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:55:24 PM	Tube furnace set to 0
6/26/2012	12:56:24 PM	Helium valve closed
6/26/2012	12:56:24 PM	H2 valve closed
6/26/2012	12:56:25 PM	BCl3 valve closed
6/26/2012	12:56:25 PM	PH3 valve closed
6/26/2012	12:56:25 PM	SiCl4 pre valve closed
6/26/2012	12:56:25 PM	SiCl4 post valve closed
6/26/2012	12:56:25 PM	Bypass valve closed
6/26/2012	12:56:25 PM	Bubbler valve closed
6/26/2012	12:56:25 PM	Main Vac valve opened
6/26/2012	12:56:25 PM	Helium MFC set to  0.000000
6/26/2012	12:56:25 PM	H2 MFC set to  0.000000
6/26/2012	12:56:25 PM	BCl3 MFC set to  0.000000
6/26/2012	12:56:25 PM	PH3 MFC set to  0.000000
6/26/2012	12:56:25 PM	SiCl4 MFC set to  0.000000
6/26/2012	12:56:25 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	12:56:25 PM	Tube furnace set to 0
6/26/2012	12:56:26 PM	Run finished at 12:56 PM
6/26/2012	12:56:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	1:14:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/26/2012	1:14:55 PM	Recipe started at 1:14 PM
6/26/2012	1:14:55 PM	Helium valve closed
6/26/2012	1:14:55 PM	H2 valve closed
6/26/2012	1:14:55 PM	BCl3 valve closed
6/26/2012	1:14:55 PM	PH3 valve closed
6/26/2012	1:14:56 PM	SiCl4 pre valve closed
6/26/2012	1:14:56 PM	SiCl4 post valve closed
6/26/2012	1:14:56 PM	Main Vac valve closed
6/26/2012	1:14:56 PM	Bubbler valve closed
6/26/2012	1:14:56 PM	Bypass valve opened
6/26/2012	1:14:56 PM	Helium MFC set to  0.000000
6/26/2012	1:14:56 PM	H2 MFC set to  0.000000
6/26/2012	1:14:56 PM	BCl3 MFC set to  0.000000
6/26/2012	1:14:56 PM	PH3 MFC set to  0.000000
6/26/2012	1:14:56 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:14:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:14:56 PM	Tube furnace set to 0
6/26/2012	1:14:56 PM	Helium valve closed
6/26/2012	1:14:56 PM	H2 valve closed
6/26/2012	1:14:56 PM	BCl3 valve closed
6/26/2012	1:14:56 PM	PH3 valve closed
6/26/2012	1:14:56 PM	SiCl4 pre valve closed
6/26/2012	1:14:56 PM	SiCl4 post valve closed
6/26/2012	1:14:56 PM	Main Vac valve closed
6/26/2012	1:14:56 PM	Bubbler valve closed
6/26/2012	1:14:56 PM	Bypass valve opened
6/26/2012	1:14:56 PM	Helium MFC set to  0.000000
6/26/2012	1:14:56 PM	H2 MFC set to  0.000000
6/26/2012	1:14:56 PM	BCl3 MFC set to  0.000000
6/26/2012	1:14:56 PM	PH3 MFC set to  0.000000
6/26/2012	1:14:56 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:14:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:14:56 PM	Tube furnace set to 0
6/26/2012	1:15:26 PM	Helium valve closed
6/26/2012	1:15:26 PM	H2 valve closed
6/26/2012	1:15:26 PM	BCl3 valve closed
6/26/2012	1:15:26 PM	PH3 valve closed
6/26/2012	1:15:26 PM	SiCl4 pre valve closed
6/26/2012	1:15:26 PM	SiCl4 post valve closed
6/26/2012	1:15:26 PM	Bypass valve closed
6/26/2012	1:15:26 PM	Bubbler valve closed
6/26/2012	1:15:26 PM	Main Vac valve opened
6/26/2012	1:15:26 PM	Helium MFC set to  0.000000
6/26/2012	1:15:26 PM	H2 MFC set to  0.000000
6/26/2012	1:15:26 PM	BCl3 MFC set to  0.000000
6/26/2012	1:15:26 PM	PH3 MFC set to  0.000000
6/26/2012	1:15:26 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:15:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:15:26 PM	Tube furnace set to 0
6/26/2012	1:15:56 PM	H2 valve closed
6/26/2012	1:15:56 PM	BCl3 valve closed
6/26/2012	1:15:57 PM	PH3 valve closed
6/26/2012	1:15:57 PM	SiCl4 pre valve closed
6/26/2012	1:15:57 PM	SiCl4 post valve closed
6/26/2012	1:15:57 PM	Bypass valve closed
6/26/2012	1:15:57 PM	Bubbler valve closed
6/26/2012	1:15:57 PM	Helium valve opened
6/26/2012	1:15:57 PM	Main Vac valve opened
6/26/2012	1:15:57 PM	Helium MFC set to  20.000000
6/26/2012	1:15:57 PM	H2 MFC set to  0.000000
6/26/2012	1:15:57 PM	BCl3 MFC set to  0.000000
6/26/2012	1:15:57 PM	PH3 MFC set to  0.000000
6/26/2012	1:15:57 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:15:57 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:15:57 PM	Tube furnace set to 0
6/26/2012	1:16:27 PM	Helium valve closed
6/26/2012	1:16:27 PM	H2 valve closed
6/26/2012	1:16:27 PM	BCl3 valve closed
6/26/2012	1:16:27 PM	PH3 valve closed
6/26/2012	1:16:27 PM	SiCl4 pre valve closed
6/26/2012	1:16:27 PM	SiCl4 post valve closed
6/26/2012	1:16:27 PM	Bypass valve closed
6/26/2012	1:16:27 PM	Bubbler valve closed
6/26/2012	1:16:27 PM	Main Vac valve opened
6/26/2012	1:16:27 PM	Helium MFC set to  0.000000
6/26/2012	1:16:27 PM	H2 MFC set to  0.000000
6/26/2012	1:16:27 PM	BCl3 MFC set to  0.000000
6/26/2012	1:16:27 PM	PH3 MFC set to  0.000000
6/26/2012	1:16:27 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:16:27 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:16:27 PM	Tube furnace set to 0
6/26/2012	1:16:57 PM	H2 valve closed
6/26/2012	1:16:57 PM	BCl3 valve closed
6/26/2012	1:16:57 PM	PH3 valve closed
6/26/2012	1:16:57 PM	SiCl4 pre valve closed
6/26/2012	1:16:57 PM	SiCl4 post valve closed
6/26/2012	1:16:57 PM	Bypass valve closed
6/26/2012	1:16:57 PM	Bubbler valve closed
6/26/2012	1:16:57 PM	Helium valve opened
6/26/2012	1:16:57 PM	Main Vac valve opened
6/26/2012	1:16:57 PM	Helium MFC set to  20.000000
6/26/2012	1:16:57 PM	H2 MFC set to  0.000000
6/26/2012	1:16:57 PM	BCl3 MFC set to  0.000000
6/26/2012	1:16:57 PM	PH3 MFC set to  0.000000
6/26/2012	1:16:57 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:16:57 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:16:57 PM	Tube furnace set to 0
6/26/2012	1:17:27 PM	Helium valve closed
6/26/2012	1:17:27 PM	H2 valve closed
6/26/2012	1:17:27 PM	BCl3 valve closed
6/26/2012	1:17:27 PM	PH3 valve closed
6/26/2012	1:17:27 PM	SiCl4 pre valve closed
6/26/2012	1:17:27 PM	SiCl4 post valve closed
6/26/2012	1:17:27 PM	Bypass valve closed
6/26/2012	1:17:27 PM	Bubbler valve closed
6/26/2012	1:17:27 PM	Main Vac valve opened
6/26/2012	1:17:27 PM	Helium MFC set to  0.000000
6/26/2012	1:17:27 PM	H2 MFC set to  0.000000
6/26/2012	1:17:27 PM	BCl3 MFC set to  0.000000
6/26/2012	1:17:27 PM	PH3 MFC set to  0.000000
6/26/2012	1:17:27 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:17:27 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:17:27 PM	Tube furnace set to 0
6/26/2012	1:17:58 PM	H2 valve closed
6/26/2012	1:17:58 PM	BCl3 valve closed
6/26/2012	1:17:58 PM	PH3 valve closed
6/26/2012	1:17:58 PM	SiCl4 pre valve closed
6/26/2012	1:17:58 PM	SiCl4 post valve closed
6/26/2012	1:17:58 PM	Bypass valve closed
6/26/2012	1:17:58 PM	Bubbler valve closed
6/26/2012	1:17:58 PM	Helium valve opened
6/26/2012	1:17:58 PM	Main Vac valve opened
6/26/2012	1:17:58 PM	Helium MFC set to  20.000000
6/26/2012	1:17:58 PM	H2 MFC set to  0.000000
6/26/2012	1:17:58 PM	BCl3 MFC set to  0.000000
6/26/2012	1:17:58 PM	PH3 MFC set to  0.000000
6/26/2012	1:17:58 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:17:58 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:17:58 PM	Tube furnace set to 0
6/26/2012	1:18:28 PM	Helium valve closed
6/26/2012	1:18:28 PM	H2 valve closed
6/26/2012	1:18:28 PM	BCl3 valve closed
6/26/2012	1:18:28 PM	PH3 valve closed
6/26/2012	1:18:28 PM	SiCl4 pre valve closed
6/26/2012	1:18:28 PM	SiCl4 post valve closed
6/26/2012	1:18:28 PM	Bypass valve closed
6/26/2012	1:18:28 PM	Bubbler valve closed
6/26/2012	1:18:28 PM	Main Vac valve opened
6/26/2012	1:18:28 PM	Helium MFC set to  0.000000
6/26/2012	1:18:28 PM	H2 MFC set to  0.000000
6/26/2012	1:18:28 PM	BCl3 MFC set to  0.000000
6/26/2012	1:18:28 PM	PH3 MFC set to  0.000000
6/26/2012	1:18:28 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:18:28 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:18:28 PM	Tube furnace set to 0
6/26/2012	1:18:58 PM	H2 valve closed
6/26/2012	1:18:58 PM	BCl3 valve closed
6/26/2012	1:18:58 PM	PH3 valve closed
6/26/2012	1:18:58 PM	SiCl4 pre valve closed
6/26/2012	1:18:58 PM	SiCl4 post valve closed
6/26/2012	1:18:58 PM	Bypass valve closed
6/26/2012	1:18:58 PM	Bubbler valve closed
6/26/2012	1:18:58 PM	Helium valve opened
6/26/2012	1:18:58 PM	Main Vac valve opened
6/26/2012	1:18:58 PM	Helium MFC set to  20.000000
6/26/2012	1:18:58 PM	H2 MFC set to  0.000000
6/26/2012	1:18:58 PM	BCl3 MFC set to  0.000000
6/26/2012	1:18:58 PM	PH3 MFC set to  0.000000
6/26/2012	1:18:58 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:18:58 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:18:58 PM	Tube furnace set to 0
6/26/2012	1:19:28 PM	Helium valve closed
6/26/2012	1:19:28 PM	H2 valve closed
6/26/2012	1:19:28 PM	BCl3 valve closed
6/26/2012	1:19:28 PM	PH3 valve closed
6/26/2012	1:19:28 PM	SiCl4 pre valve closed
6/26/2012	1:19:28 PM	SiCl4 post valve closed
6/26/2012	1:19:28 PM	Bypass valve closed
6/26/2012	1:19:28 PM	Bubbler valve closed
6/26/2012	1:19:28 PM	Main Vac valve opened
6/26/2012	1:19:28 PM	Helium MFC set to  0.000000
6/26/2012	1:19:28 PM	H2 MFC set to  0.000000
6/26/2012	1:19:28 PM	BCl3 MFC set to  0.000000
6/26/2012	1:19:28 PM	PH3 MFC set to  0.000000
6/26/2012	1:19:28 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:19:28 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:19:28 PM	Tube furnace set to 0
6/26/2012	1:19:58 PM	H2 valve closed
6/26/2012	1:19:58 PM	BCl3 valve closed
6/26/2012	1:19:58 PM	PH3 valve closed
6/26/2012	1:19:58 PM	SiCl4 pre valve closed
6/26/2012	1:19:58 PM	SiCl4 post valve closed
6/26/2012	1:19:58 PM	Bypass valve closed
6/26/2012	1:19:58 PM	Bubbler valve closed
6/26/2012	1:19:58 PM	Helium valve opened
6/26/2012	1:19:58 PM	Main Vac valve opened
6/26/2012	1:19:59 PM	Helium MFC set to  20.000000
6/26/2012	1:19:59 PM	H2 MFC set to  0.000000
6/26/2012	1:19:59 PM	BCl3 MFC set to  0.000000
6/26/2012	1:19:59 PM	PH3 MFC set to  0.000000
6/26/2012	1:19:59 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:19:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:19:59 PM	Tube furnace set to 0
6/26/2012	1:20:29 PM	Helium valve closed
6/26/2012	1:20:29 PM	H2 valve closed
6/26/2012	1:20:29 PM	BCl3 valve closed
6/26/2012	1:20:29 PM	PH3 valve closed
6/26/2012	1:20:29 PM	SiCl4 pre valve closed
6/26/2012	1:20:29 PM	SiCl4 post valve closed
6/26/2012	1:20:29 PM	Bypass valve closed
6/26/2012	1:20:29 PM	Bubbler valve closed
6/26/2012	1:20:29 PM	Main Vac valve opened
6/26/2012	1:20:29 PM	Helium MFC set to  0.000000
6/26/2012	1:20:29 PM	H2 MFC set to  0.000000
6/26/2012	1:20:29 PM	BCl3 MFC set to  0.000000
6/26/2012	1:20:29 PM	PH3 MFC set to  0.000000
6/26/2012	1:20:29 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:20:29 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:20:29 PM	Tube furnace set to 0
6/26/2012	1:20:59 PM	H2 valve closed
6/26/2012	1:20:59 PM	BCl3 valve closed
6/26/2012	1:20:59 PM	PH3 valve closed
6/26/2012	1:20:59 PM	SiCl4 pre valve closed
6/26/2012	1:20:59 PM	SiCl4 post valve closed
6/26/2012	1:20:59 PM	Bypass valve closed
6/26/2012	1:20:59 PM	Bubbler valve closed
6/26/2012	1:20:59 PM	Helium valve opened
6/26/2012	1:20:59 PM	Main Vac valve opened
6/26/2012	1:20:59 PM	Helium MFC set to  20.000000
6/26/2012	1:20:59 PM	H2 MFC set to  0.000000
6/26/2012	1:20:59 PM	BCl3 MFC set to  0.000000
6/26/2012	1:20:59 PM	PH3 MFC set to  0.000000
6/26/2012	1:20:59 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:20:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:20:59 PM	Tube furnace set to 0
6/26/2012	1:21:29 PM	Helium valve closed
6/26/2012	1:21:29 PM	H2 valve closed
6/26/2012	1:21:29 PM	BCl3 valve closed
6/26/2012	1:21:29 PM	PH3 valve closed
6/26/2012	1:21:29 PM	SiCl4 pre valve closed
6/26/2012	1:21:29 PM	SiCl4 post valve closed
6/26/2012	1:21:29 PM	Bypass valve closed
6/26/2012	1:21:29 PM	Bubbler valve closed
6/26/2012	1:21:29 PM	Main Vac valve opened
6/26/2012	1:21:29 PM	Helium MFC set to  0.000000
6/26/2012	1:21:29 PM	H2 MFC set to  0.000000
6/26/2012	1:21:29 PM	BCl3 MFC set to  0.000000
6/26/2012	1:21:29 PM	PH3 MFC set to  0.000000
6/26/2012	1:21:29 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:21:29 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:21:29 PM	Tube furnace set to 0
6/26/2012	1:21:59 PM	H2 valve closed
6/26/2012	1:21:59 PM	BCl3 valve closed
6/26/2012	1:21:59 PM	PH3 valve closed
6/26/2012	1:21:59 PM	SiCl4 pre valve closed
6/26/2012	1:21:59 PM	SiCl4 post valve closed
6/26/2012	1:21:59 PM	Bypass valve closed
6/26/2012	1:21:59 PM	Bubbler valve closed
6/26/2012	1:21:59 PM	Helium valve opened
6/26/2012	1:21:59 PM	Main Vac valve opened
6/26/2012	1:21:59 PM	Helium MFC set to  20.000000
6/26/2012	1:21:59 PM	H2 MFC set to  0.000000
6/26/2012	1:21:59 PM	BCl3 MFC set to  0.000000
6/26/2012	1:21:59 PM	PH3 MFC set to  0.000000
6/26/2012	1:21:59 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:21:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:22:00 PM	Tube furnace set to 0
6/26/2012	1:22:30 PM	Helium valve closed
6/26/2012	1:22:30 PM	H2 valve closed
6/26/2012	1:22:30 PM	BCl3 valve closed
6/26/2012	1:22:30 PM	PH3 valve closed
6/26/2012	1:22:30 PM	SiCl4 pre valve closed
6/26/2012	1:22:30 PM	SiCl4 post valve closed
6/26/2012	1:22:30 PM	Bypass valve closed
6/26/2012	1:22:30 PM	Bubbler valve closed
6/26/2012	1:22:30 PM	Main Vac valve opened
6/26/2012	1:22:30 PM	Helium MFC set to  0.000000
6/26/2012	1:22:30 PM	H2 MFC set to  0.000000
6/26/2012	1:22:30 PM	BCl3 MFC set to  0.000000
6/26/2012	1:22:30 PM	PH3 MFC set to  0.000000
6/26/2012	1:22:30 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:22:30 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:22:30 PM	Tube furnace set to 0
6/26/2012	1:23:00 PM	H2 valve closed
6/26/2012	1:23:00 PM	BCl3 valve closed
6/26/2012	1:23:00 PM	PH3 valve closed
6/26/2012	1:23:00 PM	SiCl4 pre valve closed
6/26/2012	1:23:00 PM	SiCl4 post valve closed
6/26/2012	1:23:00 PM	Bypass valve closed
6/26/2012	1:23:00 PM	Bubbler valve closed
6/26/2012	1:23:00 PM	Helium valve opened
6/26/2012	1:23:00 PM	Main Vac valve opened
6/26/2012	1:23:00 PM	Helium MFC set to  20.000000
6/26/2012	1:23:00 PM	H2 MFC set to  0.000000
6/26/2012	1:23:00 PM	BCl3 MFC set to  0.000000
6/26/2012	1:23:00 PM	PH3 MFC set to  0.000000
6/26/2012	1:23:00 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:23:00 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:23:00 PM	Tube furnace set to 0
6/26/2012	1:23:30 PM	Helium valve closed
6/26/2012	1:23:30 PM	H2 valve closed
6/26/2012	1:23:30 PM	BCl3 valve closed
6/26/2012	1:23:30 PM	PH3 valve closed
6/26/2012	1:23:30 PM	SiCl4 pre valve closed
6/26/2012	1:23:30 PM	SiCl4 post valve closed
6/26/2012	1:23:30 PM	Bypass valve closed
6/26/2012	1:23:30 PM	Bubbler valve closed
6/26/2012	1:23:30 PM	Main Vac valve opened
6/26/2012	1:23:30 PM	Helium MFC set to  0.000000
6/26/2012	1:23:30 PM	H2 MFC set to  0.000000
6/26/2012	1:23:30 PM	BCl3 MFC set to  0.000000
6/26/2012	1:23:30 PM	PH3 MFC set to  0.000000
6/26/2012	1:23:30 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:23:30 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:23:30 PM	Tube furnace set to 0
6/26/2012	1:24:00 PM	H2 valve closed
6/26/2012	1:24:00 PM	BCl3 valve closed
6/26/2012	1:24:00 PM	PH3 valve closed
6/26/2012	1:24:00 PM	SiCl4 pre valve closed
6/26/2012	1:24:00 PM	SiCl4 post valve closed
6/26/2012	1:24:00 PM	Bypass valve closed
6/26/2012	1:24:00 PM	Bubbler valve closed
6/26/2012	1:24:00 PM	Helium valve opened
6/26/2012	1:24:00 PM	Main Vac valve opened
6/26/2012	1:24:00 PM	Helium MFC set to  20.000000
6/26/2012	1:24:00 PM	H2 MFC set to  0.000000
6/26/2012	1:24:00 PM	BCl3 MFC set to  0.000000
6/26/2012	1:24:00 PM	PH3 MFC set to  0.000000
6/26/2012	1:24:00 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:24:00 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:24:01 PM	Tube furnace set to 0
6/26/2012	1:24:31 PM	Helium valve closed
6/26/2012	1:24:31 PM	H2 valve closed
6/26/2012	1:24:31 PM	BCl3 valve closed
6/26/2012	1:24:31 PM	PH3 valve closed
6/26/2012	1:24:31 PM	SiCl4 pre valve closed
6/26/2012	1:24:31 PM	SiCl4 post valve closed
6/26/2012	1:24:31 PM	Bypass valve closed
6/26/2012	1:24:31 PM	Bubbler valve closed
6/26/2012	1:24:31 PM	Main Vac valve opened
6/26/2012	1:24:31 PM	Helium MFC set to  0.000000
6/26/2012	1:24:31 PM	H2 MFC set to  0.000000
6/26/2012	1:24:31 PM	BCl3 MFC set to  0.000000
6/26/2012	1:24:31 PM	PH3 MFC set to  0.000000
6/26/2012	1:24:31 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:24:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:24:31 PM	Tube furnace set to 0
6/26/2012	1:25:01 PM	H2 valve closed
6/26/2012	1:25:01 PM	BCl3 valve closed
6/26/2012	1:25:01 PM	PH3 valve closed
6/26/2012	1:25:01 PM	SiCl4 pre valve closed
6/26/2012	1:25:01 PM	SiCl4 post valve closed
6/26/2012	1:25:01 PM	Bypass valve closed
6/26/2012	1:25:01 PM	Bubbler valve closed
6/26/2012	1:25:01 PM	Helium valve opened
6/26/2012	1:25:01 PM	Main Vac valve opened
6/26/2012	1:25:01 PM	Helium MFC set to  20.000000
6/26/2012	1:25:01 PM	H2 MFC set to  0.000000
6/26/2012	1:25:01 PM	BCl3 MFC set to  0.000000
6/26/2012	1:25:01 PM	PH3 MFC set to  0.000000
6/26/2012	1:25:01 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:25:01 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:25:01 PM	Tube furnace set to 0
6/26/2012	1:25:31 PM	Helium valve closed
6/26/2012	1:25:31 PM	H2 valve closed
6/26/2012	1:25:31 PM	BCl3 valve closed
6/26/2012	1:25:31 PM	PH3 valve closed
6/26/2012	1:25:31 PM	SiCl4 pre valve closed
6/26/2012	1:25:31 PM	SiCl4 post valve closed
6/26/2012	1:25:31 PM	Bypass valve closed
6/26/2012	1:25:31 PM	Bubbler valve closed
6/26/2012	1:25:31 PM	Main Vac valve opened
6/26/2012	1:25:31 PM	Helium MFC set to  0.000000
6/26/2012	1:25:31 PM	H2 MFC set to  0.000000
6/26/2012	1:25:31 PM	BCl3 MFC set to  0.000000
6/26/2012	1:25:31 PM	PH3 MFC set to  0.000000
6/26/2012	1:25:31 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:25:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:25:31 PM	Tube furnace set to 0
6/26/2012	1:25:32 PM	Run finished at 1:25 PM
6/26/2012	1:25:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/26/2012	1:27:44 PM	Recipe started at 1:27 PM
6/26/2012	1:27:44 PM	Helium valve closed
6/26/2012	1:27:44 PM	H2 valve closed
6/26/2012	1:27:44 PM	BCl3 valve closed
6/26/2012	1:27:44 PM	PH3 valve closed
6/26/2012	1:27:44 PM	SiCl4 pre valve closed
6/26/2012	1:27:44 PM	SiCl4 post valve closed
6/26/2012	1:27:44 PM	Main Vac valve closed
6/26/2012	1:27:44 PM	Bypass valve closed
6/26/2012	1:27:44 PM	Bubbler valve closed
6/26/2012	1:27:44 PM	Helium MFC set to  0.000000
6/26/2012	1:27:44 PM	H2 MFC set to  0.000000
6/26/2012	1:27:44 PM	BCl3 MFC set to  0.000000
6/26/2012	1:27:44 PM	PH3 MFC set to  0.000000
6/26/2012	1:27:44 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:27:44 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:27:44 PM	Tube furnace set to 0
6/26/2012	1:27:47 PM	Helium valve closed
6/26/2012	1:27:47 PM	BCl3 valve closed
6/26/2012	1:27:47 PM	PH3 valve closed
6/26/2012	1:27:47 PM	SiCl4 pre valve closed
6/26/2012	1:27:47 PM	SiCl4 post valve closed
6/26/2012	1:27:47 PM	Main Vac valve closed
6/26/2012	1:27:47 PM	Bypass valve closed
6/26/2012	1:27:47 PM	Bubbler valve closed
6/26/2012	1:27:47 PM	H2 valve opened
6/26/2012	1:27:47 PM	Helium MFC set to  0.000000
6/26/2012	1:27:47 PM	H2 MFC set to  500.000000
6/26/2012	1:27:47 PM	BCl3 MFC set to  0.000000
6/26/2012	1:27:47 PM	PH3 MFC set to  0.000000
6/26/2012	1:27:47 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:27:47 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:27:48 PM	Tube furnace set to 0
6/26/2012	1:29:04 PM	Helium valve closed
6/26/2012	1:29:04 PM	BCl3 valve closed
6/26/2012	1:29:04 PM	PH3 valve closed
6/26/2012	1:29:04 PM	SiCl4 pre valve closed
6/26/2012	1:29:04 PM	SiCl4 post valve closed
6/26/2012	1:29:04 PM	Main Vac valve closed
6/26/2012	1:29:04 PM	Bypass valve closed
6/26/2012	1:29:04 PM	H2 valve opened
6/26/2012	1:29:04 PM	Bubbler valve opened
6/26/2012	1:29:04 PM	Helium MFC set to  0.000000
6/26/2012	1:29:04 PM	H2 MFC set to  500.000000
6/26/2012	1:29:04 PM	BCl3 MFC set to  0.000000
6/26/2012	1:29:04 PM	PH3 MFC set to  0.000000
6/26/2012	1:29:04 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:29:04 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:29:04 PM	Tube furnace set to 0
6/26/2012	1:29:05 PM	Helium valve closed
6/26/2012	1:29:05 PM	BCl3 valve closed
6/26/2012	1:29:05 PM	PH3 valve closed
6/26/2012	1:29:05 PM	SiCl4 pre valve closed
6/26/2012	1:29:05 PM	SiCl4 post valve closed
6/26/2012	1:29:05 PM	Main Vac valve closed
6/26/2012	1:29:05 PM	Bypass valve closed
6/26/2012	1:29:05 PM	H2 valve opened
6/26/2012	1:29:05 PM	Bubbler valve opened
6/26/2012	1:29:05 PM	Helium MFC set to  0.000000
6/26/2012	1:29:05 PM	H2 MFC set to  500.000000
6/26/2012	1:29:05 PM	BCl3 MFC set to  0.000000
6/26/2012	1:29:05 PM	PH3 MFC set to  0.000000
6/26/2012	1:29:05 PM	SiCl4 MFC set to  0.000000
6/26/2012	1:29:05 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:29:06 PM	Tube furnace set to 1000
6/26/2012	1:49:06 PM	Helium valve closed
6/26/2012	1:49:06 PM	PH3 valve closed
6/26/2012	1:49:06 PM	Main Vac valve closed
6/26/2012	1:49:06 PM	Bypass valve closed
6/26/2012	1:49:06 PM	H2 valve opened
6/26/2012	1:49:06 PM	BCl3 valve opened
6/26/2012	1:49:06 PM	SiCl4 pre valve opened
6/26/2012	1:49:06 PM	SiCl4 post valve opened
6/26/2012	1:49:06 PM	Bubbler valve opened
6/26/2012	1:49:06 PM	Helium MFC set to  0.000000
6/26/2012	1:49:06 PM	H2 MFC set to  500.000000
6/26/2012	1:49:06 PM	BCl3 MFC set to  1.000000
6/26/2012	1:49:06 PM	PH3 MFC set to  0.000000
6/26/2012	1:49:06 PM	SiCl4 MFC set to  50.000000
6/26/2012	1:49:06 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	1:49:06 PM	Tube furnace set to 1000
6/26/2012	2:09:06 PM	Helium valve closed
6/26/2012	2:09:06 PM	BCl3 valve closed
6/26/2012	2:09:06 PM	PH3 valve closed
6/26/2012	2:09:06 PM	SiCl4 pre valve closed
6/26/2012	2:09:06 PM	SiCl4 post valve closed
6/26/2012	2:09:06 PM	Main Vac valve closed
6/26/2012	2:09:06 PM	Bypass valve closed
6/26/2012	2:09:06 PM	H2 valve opened
6/26/2012	2:09:06 PM	Bubbler valve opened
6/26/2012	2:09:06 PM	Helium MFC set to  0.000000
6/26/2012	2:09:06 PM	H2 MFC set to  500.000000
6/26/2012	2:09:06 PM	BCl3 MFC set to  0.000000
6/26/2012	2:09:06 PM	PH3 MFC set to  0.000000
6/26/2012	2:09:06 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:09:06 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:09:06 PM	Tube furnace set to 750
6/26/2012	2:14:06 PM	H2 valve closed
6/26/2012	2:14:06 PM	BCl3 valve closed
6/26/2012	2:14:06 PM	PH3 valve closed
6/26/2012	2:14:06 PM	SiCl4 pre valve closed
6/26/2012	2:14:06 PM	SiCl4 post valve closed
6/26/2012	2:14:06 PM	Main Vac valve closed
6/26/2012	2:14:06 PM	Bypass valve closed
6/26/2012	2:14:06 PM	Helium valve opened
6/26/2012	2:14:06 PM	Bubbler valve opened
6/26/2012	2:14:06 PM	Helium MFC set to  500.000000
6/26/2012	2:14:06 PM	H2 MFC set to  0.000000
6/26/2012	2:14:06 PM	BCl3 MFC set to  0.000000
6/26/2012	2:14:06 PM	PH3 MFC set to  0.000000
6/26/2012	2:14:06 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:14:06 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:14:06 PM	Tube furnace set to 0
6/26/2012	2:27:30 PM	Run aborted at 2:27 PM
6/26/2012	2:27:30 PM	Helium valve closed
6/26/2012	2:27:30 PM	H2 valve closed
6/26/2012	2:27:30 PM	BCl3 valve closed
6/26/2012	2:27:30 PM	PH3 valve closed
6/26/2012	2:27:30 PM	SiCl4 pre valve closed
6/26/2012	2:27:30 PM	SiCl4 post valve closed
6/26/2012	2:27:30 PM	Bypass valve closed
6/26/2012	2:27:30 PM	Main Vac valve closed
6/26/2012	2:27:30 PM	Bubbler valve closed
6/26/2012	2:27:30 PM	Helium MFC set to  0.000000
6/26/2012	2:27:30 PM	H2 MFC set to  0.000000
6/26/2012	2:27:30 PM	BCl3 MFC set to  0.000000
6/26/2012	2:27:30 PM	PH3 MFC set to  0.000000
6/26/2012	2:27:30 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:27:30 PM	Tube furnace set to 0
6/26/2012	2:33:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	2:34:00 PM	Recipe started at 2:33 PM
6/26/2012	2:34:00 PM	Helium valve closed
6/26/2012	2:34:00 PM	H2 valve closed
6/26/2012	2:34:00 PM	BCl3 valve closed
6/26/2012	2:34:00 PM	PH3 valve closed
6/26/2012	2:34:00 PM	SiCl4 pre valve closed
6/26/2012	2:34:00 PM	SiCl4 post valve closed
6/26/2012	2:34:00 PM	Main Vac valve closed
6/26/2012	2:34:00 PM	Bypass valve closed
6/26/2012	2:34:00 PM	Bubbler valve closed
6/26/2012	2:34:00 PM	Helium MFC set to  0.000000
6/26/2012	2:34:00 PM	H2 MFC set to  0.000000
6/26/2012	2:34:00 PM	BCl3 MFC set to  0.000000
6/26/2012	2:34:00 PM	PH3 MFC set to  0.000000
6/26/2012	2:34:00 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:34:00 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:34:00 PM	Tube furnace set to 0
6/26/2012	2:34:03 PM	H2 valve closed
6/26/2012	2:34:03 PM	BCl3 valve closed
6/26/2012	2:34:03 PM	PH3 valve closed
6/26/2012	2:34:03 PM	SiCl4 pre valve closed
6/26/2012	2:34:03 PM	SiCl4 post valve closed
6/26/2012	2:34:03 PM	Main Vac valve closed
6/26/2012	2:34:03 PM	Bypass valve closed
6/26/2012	2:34:03 PM	Bubbler valve closed
6/26/2012	2:34:03 PM	Helium valve opened
6/26/2012	2:34:03 PM	Helium MFC set to  500.000000
6/26/2012	2:34:03 PM	H2 MFC set to  0.000000
6/26/2012	2:34:03 PM	BCl3 MFC set to  0.000000
6/26/2012	2:34:03 PM	PH3 MFC set to  0.000000
6/26/2012	2:34:03 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:34:03 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:34:03 PM	Tube furnace set to 0
6/26/2012	2:34:08 PM	Helium valve closed
6/26/2012	2:34:08 PM	H2 valve closed
6/26/2012	2:34:08 PM	BCl3 valve closed
6/26/2012	2:34:08 PM	PH3 valve closed
6/26/2012	2:34:08 PM	SiCl4 pre valve closed
6/26/2012	2:34:08 PM	SiCl4 post valve closed
6/26/2012	2:34:08 PM	Main Vac valve closed
6/26/2012	2:34:08 PM	Bypass valve closed
6/26/2012	2:34:08 PM	Bubbler valve closed
6/26/2012	2:34:08 PM	Helium MFC set to  0.000000
6/26/2012	2:34:08 PM	H2 MFC set to  0.000000
6/26/2012	2:34:08 PM	BCl3 MFC set to  0.000000
6/26/2012	2:34:08 PM	PH3 MFC set to  0.000000
6/26/2012	2:34:08 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:34:08 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:34:08 PM	Tube furnace set to 0
6/26/2012	2:34:09 PM	Run finished at 2:34 PM
6/26/2012	2:34:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	2:49:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	2:49:36 PM	Recipe started at 2:49 PM
6/26/2012	2:49:36 PM	Helium valve closed
6/26/2012	2:49:36 PM	H2 valve closed
6/26/2012	2:49:36 PM	BCl3 valve closed
6/26/2012	2:49:36 PM	PH3 valve closed
6/26/2012	2:49:36 PM	SiCl4 pre valve closed
6/26/2012	2:49:36 PM	SiCl4 post valve closed
6/26/2012	2:49:36 PM	Main Vac valve closed
6/26/2012	2:49:36 PM	Bubbler valve closed
6/26/2012	2:49:36 PM	Bypass valve opened
6/26/2012	2:49:36 PM	Helium MFC set to  0.000000
6/26/2012	2:49:36 PM	H2 MFC set to  0.000000
6/26/2012	2:49:36 PM	BCl3 MFC set to  0.000000
6/26/2012	2:49:36 PM	PH3 MFC set to  0.000000
6/26/2012	2:49:36 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:49:36 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:49:36 PM	Tube furnace set to 0
6/26/2012	2:51:13 PM	Helium valve closed
6/26/2012	2:51:13 PM	H2 valve closed
6/26/2012	2:51:13 PM	BCl3 valve closed
6/26/2012	2:51:13 PM	PH3 valve closed
6/26/2012	2:51:13 PM	SiCl4 pre valve closed
6/26/2012	2:51:13 PM	SiCl4 post valve closed
6/26/2012	2:51:13 PM	Main Vac valve closed
6/26/2012	2:51:13 PM	Bubbler valve closed
6/26/2012	2:51:13 PM	Bypass valve opened
6/26/2012	2:51:13 PM	Helium MFC set to  0.000000
6/26/2012	2:51:13 PM	H2 MFC set to  0.000000
6/26/2012	2:51:13 PM	BCl3 MFC set to  0.000000
6/26/2012	2:51:13 PM	PH3 MFC set to  0.000000
6/26/2012	2:51:13 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:51:13 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:51:13 PM	Tube furnace set to 0
6/26/2012	2:52:13 PM	Helium valve closed
6/26/2012	2:52:13 PM	H2 valve closed
6/26/2012	2:52:13 PM	BCl3 valve closed
6/26/2012	2:52:13 PM	PH3 valve closed
6/26/2012	2:52:13 PM	SiCl4 pre valve closed
6/26/2012	2:52:13 PM	SiCl4 post valve closed
6/26/2012	2:52:13 PM	Bypass valve closed
6/26/2012	2:52:13 PM	Bubbler valve closed
6/26/2012	2:52:13 PM	Main Vac valve opened
6/26/2012	2:52:13 PM	Helium MFC set to  0.000000
6/26/2012	2:52:13 PM	H2 MFC set to  0.000000
6/26/2012	2:52:13 PM	BCl3 MFC set to  0.000000
6/26/2012	2:52:13 PM	PH3 MFC set to  0.000000
6/26/2012	2:52:13 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:52:13 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:52:14 PM	Tube furnace set to 0
6/26/2012	2:52:15 PM	Run finished at 2:52 PM
6/26/2012	2:52:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	2:53:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	2:53:40 PM	Recipe started at 2:53 PM
6/26/2012	2:53:40 PM	Helium valve closed
6/26/2012	2:53:40 PM	H2 valve closed
6/26/2012	2:53:40 PM	BCl3 valve closed
6/26/2012	2:53:40 PM	PH3 valve closed
6/26/2012	2:53:40 PM	SiCl4 pre valve closed
6/26/2012	2:53:40 PM	SiCl4 post valve closed
6/26/2012	2:53:40 PM	Main Vac valve closed
6/26/2012	2:53:40 PM	Bypass valve closed
6/26/2012	2:53:40 PM	Bubbler valve closed
6/26/2012	2:53:40 PM	Helium MFC set to  0.000000
6/26/2012	2:53:40 PM	H2 MFC set to  0.000000
6/26/2012	2:53:40 PM	BCl3 MFC set to  0.000000
6/26/2012	2:53:40 PM	PH3 MFC set to  0.000000
6/26/2012	2:53:40 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:53:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:53:40 PM	Tube furnace set to 0
6/26/2012	2:53:43 PM	H2 valve closed
6/26/2012	2:53:43 PM	BCl3 valve closed
6/26/2012	2:53:43 PM	PH3 valve closed
6/26/2012	2:53:43 PM	SiCl4 pre valve closed
6/26/2012	2:53:43 PM	SiCl4 post valve closed
6/26/2012	2:53:43 PM	Main Vac valve closed
6/26/2012	2:53:43 PM	Bypass valve closed
6/26/2012	2:53:43 PM	Bubbler valve closed
6/26/2012	2:53:43 PM	Helium valve opened
6/26/2012	2:53:43 PM	Helium MFC set to  500.000000
6/26/2012	2:53:43 PM	H2 MFC set to  0.000000
6/26/2012	2:53:43 PM	BCl3 MFC set to  0.000000
6/26/2012	2:53:43 PM	PH3 MFC set to  0.000000
6/26/2012	2:53:43 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:53:43 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:53:44 PM	Tube furnace set to 0
6/26/2012	2:54:56 PM	Helium valve closed
6/26/2012	2:54:56 PM	H2 valve closed
6/26/2012	2:54:56 PM	BCl3 valve closed
6/26/2012	2:54:56 PM	PH3 valve closed
6/26/2012	2:54:56 PM	SiCl4 pre valve closed
6/26/2012	2:54:56 PM	SiCl4 post valve closed
6/26/2012	2:54:56 PM	Main Vac valve closed
6/26/2012	2:54:56 PM	Bypass valve closed
6/26/2012	2:54:56 PM	Bubbler valve closed
6/26/2012	2:54:56 PM	Helium MFC set to  0.000000
6/26/2012	2:54:56 PM	H2 MFC set to  0.000000
6/26/2012	2:54:56 PM	BCl3 MFC set to  0.000000
6/26/2012	2:54:56 PM	PH3 MFC set to  0.000000
6/26/2012	2:54:56 PM	SiCl4 MFC set to  0.000000
6/26/2012	2:54:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	2:54:56 PM	Tube furnace set to 0
6/26/2012	2:54:57 PM	Run finished at 2:54 PM
6/26/2012	2:54:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	3:01:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	3:01:31 PM	Recipe started at 3:01 PM
6/26/2012	3:01:31 PM	Helium valve closed
6/26/2012	3:01:31 PM	H2 valve closed
6/26/2012	3:01:31 PM	BCl3 valve closed
6/26/2012	3:01:31 PM	PH3 valve closed
6/26/2012	3:01:31 PM	SiCl4 pre valve closed
6/26/2012	3:01:31 PM	SiCl4 post valve closed
6/26/2012	3:01:31 PM	Main Vac valve closed
6/26/2012	3:01:31 PM	Bubbler valve closed
6/26/2012	3:01:31 PM	Bypass valve opened
6/26/2012	3:01:31 PM	Helium MFC set to  0.000000
6/26/2012	3:01:31 PM	H2 MFC set to  0.000000
6/26/2012	3:01:31 PM	BCl3 MFC set to  0.000000
6/26/2012	3:01:31 PM	PH3 MFC set to  0.000000
6/26/2012	3:01:31 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:01:31 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:01:31 PM	Tube furnace set to 0
6/26/2012	3:02:40 PM	Helium valve closed
6/26/2012	3:02:40 PM	H2 valve closed
6/26/2012	3:02:40 PM	BCl3 valve closed
6/26/2012	3:02:40 PM	PH3 valve closed
6/26/2012	3:02:40 PM	SiCl4 pre valve closed
6/26/2012	3:02:40 PM	SiCl4 post valve closed
6/26/2012	3:02:40 PM	Main Vac valve closed
6/26/2012	3:02:40 PM	Bubbler valve closed
6/26/2012	3:02:40 PM	Bypass valve opened
6/26/2012	3:02:40 PM	Helium MFC set to  0.000000
6/26/2012	3:02:40 PM	H2 MFC set to  0.000000
6/26/2012	3:02:40 PM	BCl3 MFC set to  0.000000
6/26/2012	3:02:40 PM	PH3 MFC set to  0.000000
6/26/2012	3:02:40 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:02:40 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:02:40 PM	Tube furnace set to 0
6/26/2012	3:03:41 PM	Helium valve closed
6/26/2012	3:03:41 PM	H2 valve closed
6/26/2012	3:03:41 PM	BCl3 valve closed
6/26/2012	3:03:41 PM	PH3 valve closed
6/26/2012	3:03:41 PM	SiCl4 pre valve closed
6/26/2012	3:03:41 PM	SiCl4 post valve closed
6/26/2012	3:03:41 PM	Bypass valve closed
6/26/2012	3:03:41 PM	Bubbler valve closed
6/26/2012	3:03:41 PM	Main Vac valve opened
6/26/2012	3:03:41 PM	Helium MFC set to  0.000000
6/26/2012	3:03:41 PM	H2 MFC set to  0.000000
6/26/2012	3:03:41 PM	BCl3 MFC set to  0.000000
6/26/2012	3:03:41 PM	PH3 MFC set to  0.000000
6/26/2012	3:03:41 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:03:41 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:03:41 PM	Tube furnace set to 0
6/26/2012	3:03:42 PM	Run finished at 3:03 PM
6/26/2012	3:03:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	3:26:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/26/2012	3:26:54 PM	Recipe started at 3:26 PM
6/26/2012	3:26:54 PM	Helium valve closed
6/26/2012	3:26:54 PM	H2 valve closed
6/26/2012	3:26:54 PM	BCl3 valve closed
6/26/2012	3:26:54 PM	PH3 valve closed
6/26/2012	3:26:54 PM	SiCl4 pre valve closed
6/26/2012	3:26:54 PM	SiCl4 post valve closed
6/26/2012	3:26:54 PM	Main Vac valve closed
6/26/2012	3:26:54 PM	Bubbler valve closed
6/26/2012	3:26:54 PM	Bypass valve opened
6/26/2012	3:26:54 PM	Helium MFC set to  0.000000
6/26/2012	3:26:54 PM	H2 MFC set to  0.000000
6/26/2012	3:26:54 PM	BCl3 MFC set to  0.000000
6/26/2012	3:26:54 PM	PH3 MFC set to  0.000000
6/26/2012	3:26:54 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:26:54 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:26:54 PM	Tube furnace set to 0
6/26/2012	3:26:54 PM	Helium valve closed
6/26/2012	3:26:54 PM	H2 valve closed
6/26/2012	3:26:54 PM	BCl3 valve closed
6/26/2012	3:26:54 PM	PH3 valve closed
6/26/2012	3:26:54 PM	SiCl4 pre valve closed
6/26/2012	3:26:54 PM	SiCl4 post valve closed
6/26/2012	3:26:54 PM	Main Vac valve closed
6/26/2012	3:26:54 PM	Bubbler valve closed
6/26/2012	3:26:54 PM	Bypass valve opened
6/26/2012	3:26:54 PM	Helium MFC set to  0.000000
6/26/2012	3:26:54 PM	H2 MFC set to  0.000000
6/26/2012	3:26:54 PM	BCl3 MFC set to  0.000000
6/26/2012	3:26:54 PM	PH3 MFC set to  0.000000
6/26/2012	3:26:54 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:26:54 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:26:55 PM	Tube furnace set to 0
6/26/2012	3:27:25 PM	Helium valve closed
6/26/2012	3:27:25 PM	H2 valve closed
6/26/2012	3:27:25 PM	BCl3 valve closed
6/26/2012	3:27:25 PM	PH3 valve closed
6/26/2012	3:27:25 PM	SiCl4 pre valve closed
6/26/2012	3:27:25 PM	SiCl4 post valve closed
6/26/2012	3:27:25 PM	Bypass valve closed
6/26/2012	3:27:25 PM	Bubbler valve closed
6/26/2012	3:27:25 PM	Main Vac valve opened
6/26/2012	3:27:25 PM	Helium MFC set to  0.000000
6/26/2012	3:27:25 PM	H2 MFC set to  0.000000
6/26/2012	3:27:25 PM	BCl3 MFC set to  0.000000
6/26/2012	3:27:25 PM	PH3 MFC set to  0.000000
6/26/2012	3:27:25 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:27:25 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:27:25 PM	Tube furnace set to 0
6/26/2012	3:27:55 PM	H2 valve closed
6/26/2012	3:27:55 PM	BCl3 valve closed
6/26/2012	3:27:55 PM	PH3 valve closed
6/26/2012	3:27:55 PM	SiCl4 pre valve closed
6/26/2012	3:27:55 PM	SiCl4 post valve closed
6/26/2012	3:27:55 PM	Bypass valve closed
6/26/2012	3:27:55 PM	Bubbler valve closed
6/26/2012	3:27:55 PM	Helium valve opened
6/26/2012	3:27:55 PM	Main Vac valve opened
6/26/2012	3:27:55 PM	Helium MFC set to  20.000000
6/26/2012	3:27:55 PM	H2 MFC set to  0.000000
6/26/2012	3:27:55 PM	BCl3 MFC set to  0.000000
6/26/2012	3:27:55 PM	PH3 MFC set to  0.000000
6/26/2012	3:27:55 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:27:55 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:27:55 PM	Tube furnace set to 0
6/26/2012	3:28:25 PM	Helium valve closed
6/26/2012	3:28:25 PM	H2 valve closed
6/26/2012	3:28:25 PM	BCl3 valve closed
6/26/2012	3:28:25 PM	PH3 valve closed
6/26/2012	3:28:25 PM	SiCl4 pre valve closed
6/26/2012	3:28:25 PM	SiCl4 post valve closed
6/26/2012	3:28:25 PM	Bypass valve closed
6/26/2012	3:28:25 PM	Bubbler valve closed
6/26/2012	3:28:25 PM	Main Vac valve opened
6/26/2012	3:28:25 PM	Helium MFC set to  0.000000
6/26/2012	3:28:25 PM	H2 MFC set to  0.000000
6/26/2012	3:28:25 PM	BCl3 MFC set to  0.000000
6/26/2012	3:28:25 PM	PH3 MFC set to  0.000000
6/26/2012	3:28:25 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:28:25 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:28:25 PM	Tube furnace set to 0
6/26/2012	3:28:55 PM	H2 valve closed
6/26/2012	3:28:55 PM	BCl3 valve closed
6/26/2012	3:28:55 PM	PH3 valve closed
6/26/2012	3:28:55 PM	SiCl4 pre valve closed
6/26/2012	3:28:55 PM	SiCl4 post valve closed
6/26/2012	3:28:55 PM	Bypass valve closed
6/26/2012	3:28:55 PM	Bubbler valve closed
6/26/2012	3:28:55 PM	Helium valve opened
6/26/2012	3:28:55 PM	Main Vac valve opened
6/26/2012	3:28:55 PM	Helium MFC set to  20.000000
6/26/2012	3:28:55 PM	H2 MFC set to  0.000000
6/26/2012	3:28:55 PM	BCl3 MFC set to  0.000000
6/26/2012	3:28:55 PM	PH3 MFC set to  0.000000
6/26/2012	3:28:55 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:28:55 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:28:55 PM	Tube furnace set to 0
6/26/2012	3:29:25 PM	Helium valve closed
6/26/2012	3:29:25 PM	H2 valve closed
6/26/2012	3:29:25 PM	BCl3 valve closed
6/26/2012	3:29:25 PM	PH3 valve closed
6/26/2012	3:29:26 PM	SiCl4 pre valve closed
6/26/2012	3:29:26 PM	SiCl4 post valve closed
6/26/2012	3:29:26 PM	Bypass valve closed
6/26/2012	3:29:26 PM	Bubbler valve closed
6/26/2012	3:29:26 PM	Main Vac valve opened
6/26/2012	3:29:26 PM	Helium MFC set to  0.000000
6/26/2012	3:29:26 PM	H2 MFC set to  0.000000
6/26/2012	3:29:26 PM	BCl3 MFC set to  0.000000
6/26/2012	3:29:26 PM	PH3 MFC set to  0.000000
6/26/2012	3:29:26 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:29:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:29:26 PM	Tube furnace set to 0
6/26/2012	3:29:56 PM	H2 valve closed
6/26/2012	3:29:56 PM	BCl3 valve closed
6/26/2012	3:29:56 PM	PH3 valve closed
6/26/2012	3:29:56 PM	SiCl4 pre valve closed
6/26/2012	3:29:56 PM	SiCl4 post valve closed
6/26/2012	3:29:56 PM	Bypass valve closed
6/26/2012	3:29:56 PM	Bubbler valve closed
6/26/2012	3:29:56 PM	Helium valve opened
6/26/2012	3:29:56 PM	Main Vac valve opened
6/26/2012	3:29:56 PM	Helium MFC set to  20.000000
6/26/2012	3:29:56 PM	H2 MFC set to  0.000000
6/26/2012	3:29:56 PM	BCl3 MFC set to  0.000000
6/26/2012	3:29:56 PM	PH3 MFC set to  0.000000
6/26/2012	3:29:56 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:29:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:29:56 PM	Tube furnace set to 0
6/26/2012	3:30:26 PM	Helium valve closed
6/26/2012	3:30:26 PM	H2 valve closed
6/26/2012	3:30:26 PM	BCl3 valve closed
6/26/2012	3:30:26 PM	PH3 valve closed
6/26/2012	3:30:26 PM	SiCl4 pre valve closed
6/26/2012	3:30:26 PM	SiCl4 post valve closed
6/26/2012	3:30:26 PM	Bypass valve closed
6/26/2012	3:30:26 PM	Bubbler valve closed
6/26/2012	3:30:26 PM	Main Vac valve opened
6/26/2012	3:30:26 PM	Helium MFC set to  0.000000
6/26/2012	3:30:26 PM	H2 MFC set to  0.000000
6/26/2012	3:30:26 PM	BCl3 MFC set to  0.000000
6/26/2012	3:30:26 PM	PH3 MFC set to  0.000000
6/26/2012	3:30:26 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:30:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:30:26 PM	Tube furnace set to 0
6/26/2012	3:30:56 PM	H2 valve closed
6/26/2012	3:30:56 PM	BCl3 valve closed
6/26/2012	3:30:56 PM	PH3 valve closed
6/26/2012	3:30:56 PM	SiCl4 pre valve closed
6/26/2012	3:30:56 PM	SiCl4 post valve closed
6/26/2012	3:30:56 PM	Bypass valve closed
6/26/2012	3:30:56 PM	Bubbler valve closed
6/26/2012	3:30:56 PM	Helium valve opened
6/26/2012	3:30:56 PM	Main Vac valve opened
6/26/2012	3:30:56 PM	Helium MFC set to  20.000000
6/26/2012	3:30:56 PM	H2 MFC set to  0.000000
6/26/2012	3:30:56 PM	BCl3 MFC set to  0.000000
6/26/2012	3:30:56 PM	PH3 MFC set to  0.000000
6/26/2012	3:30:56 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:30:56 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:30:56 PM	Tube furnace set to 0
6/26/2012	3:31:26 PM	Helium valve closed
6/26/2012	3:31:26 PM	H2 valve closed
6/26/2012	3:31:26 PM	BCl3 valve closed
6/26/2012	3:31:26 PM	PH3 valve closed
6/26/2012	3:31:26 PM	SiCl4 pre valve closed
6/26/2012	3:31:26 PM	SiCl4 post valve closed
6/26/2012	3:31:26 PM	Bypass valve closed
6/26/2012	3:31:26 PM	Bubbler valve closed
6/26/2012	3:31:26 PM	Main Vac valve opened
6/26/2012	3:31:26 PM	Helium MFC set to  0.000000
6/26/2012	3:31:26 PM	H2 MFC set to  0.000000
6/26/2012	3:31:26 PM	BCl3 MFC set to  0.000000
6/26/2012	3:31:26 PM	PH3 MFC set to  0.000000
6/26/2012	3:31:26 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:31:26 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:31:27 PM	Tube furnace set to 0
6/26/2012	3:31:57 PM	H2 valve closed
6/26/2012	3:31:57 PM	BCl3 valve closed
6/26/2012	3:31:57 PM	PH3 valve closed
6/26/2012	3:31:57 PM	SiCl4 pre valve closed
6/26/2012	3:31:57 PM	SiCl4 post valve closed
6/26/2012	3:31:57 PM	Bypass valve closed
6/26/2012	3:31:57 PM	Bubbler valve closed
6/26/2012	3:31:57 PM	Helium valve opened
6/26/2012	3:31:57 PM	Main Vac valve opened
6/26/2012	3:31:57 PM	Helium MFC set to  20.000000
6/26/2012	3:31:57 PM	H2 MFC set to  0.000000
6/26/2012	3:31:57 PM	BCl3 MFC set to  0.000000
6/26/2012	3:31:57 PM	PH3 MFC set to  0.000000
6/26/2012	3:31:57 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:31:57 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:31:57 PM	Tube furnace set to 0
6/26/2012	3:32:27 PM	Helium valve closed
6/26/2012	3:32:27 PM	H2 valve closed
6/26/2012	3:32:27 PM	BCl3 valve closed
6/26/2012	3:32:27 PM	PH3 valve closed
6/26/2012	3:32:27 PM	SiCl4 pre valve closed
6/26/2012	3:32:27 PM	SiCl4 post valve closed
6/26/2012	3:32:27 PM	Bypass valve closed
6/26/2012	3:32:27 PM	Bubbler valve closed
6/26/2012	3:32:27 PM	Main Vac valve opened
6/26/2012	3:32:27 PM	Helium MFC set to  0.000000
6/26/2012	3:32:27 PM	H2 MFC set to  0.000000
6/26/2012	3:32:27 PM	BCl3 MFC set to  0.000000
6/26/2012	3:32:27 PM	PH3 MFC set to  0.000000
6/26/2012	3:32:27 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:32:27 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:32:27 PM	Tube furnace set to 0
6/26/2012	3:32:57 PM	H2 valve closed
6/26/2012	3:32:57 PM	BCl3 valve closed
6/26/2012	3:32:57 PM	PH3 valve closed
6/26/2012	3:32:57 PM	SiCl4 pre valve closed
6/26/2012	3:32:57 PM	SiCl4 post valve closed
6/26/2012	3:32:57 PM	Bypass valve closed
6/26/2012	3:32:57 PM	Bubbler valve closed
6/26/2012	3:32:57 PM	Helium valve opened
6/26/2012	3:32:57 PM	Main Vac valve opened
6/26/2012	3:32:57 PM	Helium MFC set to  20.000000
6/26/2012	3:32:57 PM	H2 MFC set to  0.000000
6/26/2012	3:32:57 PM	BCl3 MFC set to  0.000000
6/26/2012	3:32:57 PM	PH3 MFC set to  0.000000
6/26/2012	3:32:57 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:32:57 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:32:57 PM	Tube furnace set to 0
6/26/2012	3:33:27 PM	Helium valve closed
6/26/2012	3:33:27 PM	H2 valve closed
6/26/2012	3:33:27 PM	BCl3 valve closed
6/26/2012	3:33:27 PM	PH3 valve closed
6/26/2012	3:33:27 PM	SiCl4 pre valve closed
6/26/2012	3:33:27 PM	SiCl4 post valve closed
6/26/2012	3:33:27 PM	Bypass valve closed
6/26/2012	3:33:27 PM	Bubbler valve closed
6/26/2012	3:33:27 PM	Main Vac valve opened
6/26/2012	3:33:27 PM	Helium MFC set to  0.000000
6/26/2012	3:33:27 PM	H2 MFC set to  0.000000
6/26/2012	3:33:27 PM	BCl3 MFC set to  0.000000
6/26/2012	3:33:27 PM	PH3 MFC set to  0.000000
6/26/2012	3:33:27 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:33:27 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:33:28 PM	Tube furnace set to 0
6/26/2012	3:33:58 PM	H2 valve closed
6/26/2012	3:33:58 PM	BCl3 valve closed
6/26/2012	3:33:58 PM	PH3 valve closed
6/26/2012	3:33:58 PM	SiCl4 pre valve closed
6/26/2012	3:33:58 PM	SiCl4 post valve closed
6/26/2012	3:33:58 PM	Bypass valve closed
6/26/2012	3:33:58 PM	Bubbler valve closed
6/26/2012	3:33:58 PM	Helium valve opened
6/26/2012	3:33:58 PM	Main Vac valve opened
6/26/2012	3:33:58 PM	Helium MFC set to  20.000000
6/26/2012	3:33:58 PM	H2 MFC set to  0.000000
6/26/2012	3:33:58 PM	BCl3 MFC set to  0.000000
6/26/2012	3:33:58 PM	PH3 MFC set to  0.000000
6/26/2012	3:33:58 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:33:58 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:33:58 PM	Tube furnace set to 0
6/26/2012	3:34:28 PM	Helium valve closed
6/26/2012	3:34:28 PM	H2 valve closed
6/26/2012	3:34:28 PM	BCl3 valve closed
6/26/2012	3:34:28 PM	PH3 valve closed
6/26/2012	3:34:28 PM	SiCl4 pre valve closed
6/26/2012	3:34:28 PM	SiCl4 post valve closed
6/26/2012	3:34:28 PM	Bypass valve closed
6/26/2012	3:34:28 PM	Bubbler valve closed
6/26/2012	3:34:28 PM	Main Vac valve opened
6/26/2012	3:34:28 PM	Helium MFC set to  0.000000
6/26/2012	3:34:28 PM	H2 MFC set to  0.000000
6/26/2012	3:34:28 PM	BCl3 MFC set to  0.000000
6/26/2012	3:34:28 PM	PH3 MFC set to  0.000000
6/26/2012	3:34:28 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:34:28 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:34:28 PM	Tube furnace set to 0
6/26/2012	3:34:58 PM	H2 valve closed
6/26/2012	3:34:58 PM	BCl3 valve closed
6/26/2012	3:34:58 PM	PH3 valve closed
6/26/2012	3:34:58 PM	SiCl4 pre valve closed
6/26/2012	3:34:58 PM	SiCl4 post valve closed
6/26/2012	3:34:58 PM	Bypass valve closed
6/26/2012	3:34:58 PM	Bubbler valve closed
6/26/2012	3:34:58 PM	Helium valve opened
6/26/2012	3:34:58 PM	Main Vac valve opened
6/26/2012	3:34:58 PM	Helium MFC set to  20.000000
6/26/2012	3:34:58 PM	H2 MFC set to  0.000000
6/26/2012	3:34:58 PM	BCl3 MFC set to  0.000000
6/26/2012	3:34:58 PM	PH3 MFC set to  0.000000
6/26/2012	3:34:58 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:34:58 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:34:58 PM	Tube furnace set to 0
6/26/2012	3:35:28 PM	Helium valve closed
6/26/2012	3:35:28 PM	H2 valve closed
6/26/2012	3:35:28 PM	BCl3 valve closed
6/26/2012	3:35:28 PM	PH3 valve closed
6/26/2012	3:35:28 PM	SiCl4 pre valve closed
6/26/2012	3:35:28 PM	SiCl4 post valve closed
6/26/2012	3:35:28 PM	Bypass valve closed
6/26/2012	3:35:28 PM	Bubbler valve closed
6/26/2012	3:35:28 PM	Main Vac valve opened
6/26/2012	3:35:28 PM	Helium MFC set to  0.000000
6/26/2012	3:35:28 PM	H2 MFC set to  0.000000
6/26/2012	3:35:28 PM	BCl3 MFC set to  0.000000
6/26/2012	3:35:28 PM	PH3 MFC set to  0.000000
6/26/2012	3:35:28 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:35:28 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:35:29 PM	Tube furnace set to 0
6/26/2012	3:35:59 PM	H2 valve closed
6/26/2012	3:35:59 PM	BCl3 valve closed
6/26/2012	3:35:59 PM	PH3 valve closed
6/26/2012	3:35:59 PM	SiCl4 pre valve closed
6/26/2012	3:35:59 PM	SiCl4 post valve closed
6/26/2012	3:35:59 PM	Bypass valve closed
6/26/2012	3:35:59 PM	Bubbler valve closed
6/26/2012	3:35:59 PM	Helium valve opened
6/26/2012	3:35:59 PM	Main Vac valve opened
6/26/2012	3:35:59 PM	Helium MFC set to  20.000000
6/26/2012	3:35:59 PM	H2 MFC set to  0.000000
6/26/2012	3:35:59 PM	BCl3 MFC set to  0.000000
6/26/2012	3:35:59 PM	PH3 MFC set to  0.000000
6/26/2012	3:35:59 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:35:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:35:59 PM	Tube furnace set to 0
6/26/2012	3:36:29 PM	Helium valve closed
6/26/2012	3:36:29 PM	H2 valve closed
6/26/2012	3:36:29 PM	BCl3 valve closed
6/26/2012	3:36:29 PM	PH3 valve closed
6/26/2012	3:36:29 PM	SiCl4 pre valve closed
6/26/2012	3:36:29 PM	SiCl4 post valve closed
6/26/2012	3:36:29 PM	Bypass valve closed
6/26/2012	3:36:29 PM	Bubbler valve closed
6/26/2012	3:36:29 PM	Main Vac valve opened
6/26/2012	3:36:29 PM	Helium MFC set to  0.000000
6/26/2012	3:36:29 PM	H2 MFC set to  0.000000
6/26/2012	3:36:29 PM	BCl3 MFC set to  0.000000
6/26/2012	3:36:29 PM	PH3 MFC set to  0.000000
6/26/2012	3:36:29 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:36:29 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:36:29 PM	Tube furnace set to 0
6/26/2012	3:36:59 PM	H2 valve closed
6/26/2012	3:36:59 PM	BCl3 valve closed
6/26/2012	3:36:59 PM	PH3 valve closed
6/26/2012	3:36:59 PM	SiCl4 pre valve closed
6/26/2012	3:36:59 PM	SiCl4 post valve closed
6/26/2012	3:36:59 PM	Bypass valve closed
6/26/2012	3:36:59 PM	Bubbler valve closed
6/26/2012	3:36:59 PM	Helium valve opened
6/26/2012	3:36:59 PM	Main Vac valve opened
6/26/2012	3:36:59 PM	Helium MFC set to  20.000000
6/26/2012	3:36:59 PM	H2 MFC set to  0.000000
6/26/2012	3:36:59 PM	BCl3 MFC set to  0.000000
6/26/2012	3:36:59 PM	PH3 MFC set to  0.000000
6/26/2012	3:36:59 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:36:59 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:36:59 PM	Tube furnace set to 0
6/26/2012	3:37:29 PM	Helium valve closed
6/26/2012	3:37:29 PM	H2 valve closed
6/26/2012	3:37:29 PM	BCl3 valve closed
6/26/2012	3:37:29 PM	PH3 valve closed
6/26/2012	3:37:29 PM	SiCl4 pre valve closed
6/26/2012	3:37:29 PM	SiCl4 post valve closed
6/26/2012	3:37:29 PM	Bypass valve closed
6/26/2012	3:37:29 PM	Bubbler valve closed
6/26/2012	3:37:29 PM	Main Vac valve opened
6/26/2012	3:37:29 PM	Helium MFC set to  0.000000
6/26/2012	3:37:29 PM	H2 MFC set to  0.000000
6/26/2012	3:37:29 PM	BCl3 MFC set to  0.000000
6/26/2012	3:37:29 PM	PH3 MFC set to  0.000000
6/26/2012	3:37:29 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:37:29 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:37:29 PM	Tube furnace set to 0
6/26/2012	3:37:30 PM	Run finished at 3:37 PM
6/26/2012	3:37:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/26/2012	3:44:26 PM	Main Vac valve closed
6/26/2012	3:44:35 PM	Main Vac valve opened
6/26/2012	3:44:48 PM	Recipe started at 3:44 PM
6/26/2012	3:44:48 PM	Helium valve closed
6/26/2012	3:44:48 PM	H2 valve closed
6/26/2012	3:44:48 PM	BCl3 valve closed
6/26/2012	3:44:48 PM	PH3 valve closed
6/26/2012	3:44:48 PM	SiCl4 pre valve closed
6/26/2012	3:44:48 PM	SiCl4 post valve closed
6/26/2012	3:44:49 PM	Main Vac valve closed
6/26/2012	3:44:49 PM	Bypass valve closed
6/26/2012	3:44:49 PM	Bubbler valve closed
6/26/2012	3:44:49 PM	Helium MFC set to  0.000000
6/26/2012	3:44:49 PM	H2 MFC set to  0.000000
6/26/2012	3:44:49 PM	BCl3 MFC set to  0.000000
6/26/2012	3:44:49 PM	PH3 MFC set to  0.000000
6/26/2012	3:44:49 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:44:49 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:44:49 PM	Tube furnace set to 0
6/26/2012	3:44:52 PM	Helium valve closed
6/26/2012	3:44:52 PM	BCl3 valve closed
6/26/2012	3:44:52 PM	PH3 valve closed
6/26/2012	3:44:52 PM	SiCl4 pre valve closed
6/26/2012	3:44:52 PM	SiCl4 post valve closed
6/26/2012	3:44:52 PM	Main Vac valve closed
6/26/2012	3:44:52 PM	Bypass valve closed
6/26/2012	3:44:52 PM	Bubbler valve closed
6/26/2012	3:44:52 PM	H2 valve opened
6/26/2012	3:44:52 PM	Helium MFC set to  0.000000
6/26/2012	3:44:52 PM	H2 MFC set to  500.000000
6/26/2012	3:44:52 PM	BCl3 MFC set to  0.000000
6/26/2012	3:44:52 PM	PH3 MFC set to  0.000000
6/26/2012	3:44:52 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:44:52 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:44:52 PM	Tube furnace set to 0
6/26/2012	3:46:08 PM	Helium valve closed
6/26/2012	3:46:08 PM	BCl3 valve closed
6/26/2012	3:46:08 PM	PH3 valve closed
6/26/2012	3:46:08 PM	SiCl4 pre valve closed
6/26/2012	3:46:08 PM	SiCl4 post valve closed
6/26/2012	3:46:08 PM	Main Vac valve closed
6/26/2012	3:46:08 PM	Bypass valve closed
6/26/2012	3:46:08 PM	H2 valve opened
6/26/2012	3:46:08 PM	Bubbler valve opened
6/26/2012	3:46:08 PM	Helium MFC set to  0.000000
6/26/2012	3:46:08 PM	H2 MFC set to  500.000000
6/26/2012	3:46:08 PM	BCl3 MFC set to  0.000000
6/26/2012	3:46:09 PM	PH3 MFC set to  0.000000
6/26/2012	3:46:09 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:46:09 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:46:09 PM	Tube furnace set to 0
6/26/2012	3:46:10 PM	Helium valve closed
6/26/2012	3:46:10 PM	BCl3 valve closed
6/26/2012	3:46:10 PM	PH3 valve closed
6/26/2012	3:46:10 PM	SiCl4 pre valve closed
6/26/2012	3:46:10 PM	SiCl4 post valve closed
6/26/2012	3:46:10 PM	Main Vac valve closed
6/26/2012	3:46:10 PM	Bypass valve closed
6/26/2012	3:46:10 PM	H2 valve opened
6/26/2012	3:46:10 PM	Bubbler valve opened
6/26/2012	3:46:10 PM	Helium MFC set to  0.000000
6/26/2012	3:46:10 PM	H2 MFC set to  500.000000
6/26/2012	3:46:10 PM	BCl3 MFC set to  0.000000
6/26/2012	3:46:10 PM	PH3 MFC set to  0.000000
6/26/2012	3:46:10 PM	SiCl4 MFC set to  0.000000
6/26/2012	3:46:10 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	3:46:10 PM	Tube furnace set to 950
6/26/2012	4:06:10 PM	Helium valve closed
6/26/2012	4:06:10 PM	PH3 valve closed
6/26/2012	4:06:10 PM	Main Vac valve closed
6/26/2012	4:06:10 PM	Bypass valve closed
6/26/2012	4:06:10 PM	H2 valve opened
6/26/2012	4:06:10 PM	BCl3 valve opened
6/26/2012	4:06:10 PM	SiCl4 pre valve opened
6/26/2012	4:06:10 PM	SiCl4 post valve opened
6/26/2012	4:06:10 PM	Bubbler valve opened
6/26/2012	4:06:10 PM	Helium MFC set to  0.000000
6/26/2012	4:06:10 PM	H2 MFC set to  500.000000
6/26/2012	4:06:10 PM	BCl3 MFC set to  1.000000
6/26/2012	4:06:10 PM	PH3 MFC set to  0.000000
6/26/2012	4:06:10 PM	SiCl4 MFC set to  25.000000
6/26/2012	4:06:10 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:06:10 PM	Tube furnace set to 950
6/26/2012	4:26:10 PM	Helium valve closed
6/26/2012	4:26:10 PM	BCl3 valve closed
6/26/2012	4:26:10 PM	PH3 valve closed
6/26/2012	4:26:10 PM	SiCl4 pre valve closed
6/26/2012	4:26:10 PM	SiCl4 post valve closed
6/26/2012	4:26:10 PM	Main Vac valve closed
6/26/2012	4:26:10 PM	Bypass valve closed
6/26/2012	4:26:10 PM	H2 valve opened
6/26/2012	4:26:10 PM	Bubbler valve opened
6/26/2012	4:26:10 PM	Helium MFC set to  0.000000
6/26/2012	4:26:10 PM	H2 MFC set to  500.000000
6/26/2012	4:26:10 PM	BCl3 MFC set to  0.000000
6/26/2012	4:26:10 PM	PH3 MFC set to  0.000000
6/26/2012	4:26:10 PM	SiCl4 MFC set to  0.000000
6/26/2012	4:26:10 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:26:10 PM	Tube furnace set to 750
6/26/2012	4:31:10 PM	H2 valve closed
6/26/2012	4:31:10 PM	BCl3 valve closed
6/26/2012	4:31:10 PM	PH3 valve closed
6/26/2012	4:31:10 PM	SiCl4 pre valve closed
6/26/2012	4:31:10 PM	SiCl4 post valve closed
6/26/2012	4:31:10 PM	Main Vac valve closed
6/26/2012	4:31:10 PM	Bypass valve closed
6/26/2012	4:31:10 PM	Helium valve opened
6/26/2012	4:31:10 PM	Bubbler valve opened
6/26/2012	4:31:10 PM	Helium MFC set to  500.000000
6/26/2012	4:31:10 PM	H2 MFC set to  0.000000
6/26/2012	4:31:10 PM	BCl3 MFC set to  0.000000
6/26/2012	4:31:10 PM	PH3 MFC set to  0.000000
6/26/2012	4:31:10 PM	SiCl4 MFC set to  0.000000
6/26/2012	4:31:10 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:31:11 PM	Tube furnace set to 0
6/26/2012	4:51:11 PM	Helium valve closed
6/26/2012	4:51:11 PM	H2 valve closed
6/26/2012	4:51:11 PM	BCl3 valve closed
6/26/2012	4:51:11 PM	PH3 valve closed
6/26/2012	4:51:11 PM	SiCl4 pre valve closed
6/26/2012	4:51:11 PM	SiCl4 post valve closed
6/26/2012	4:51:11 PM	Main Vac valve closed
6/26/2012	4:51:11 PM	Bypass valve closed
6/26/2012	4:51:11 PM	Bubbler valve closed
6/26/2012	4:51:11 PM	Helium MFC set to  0.000000
6/26/2012	4:51:11 PM	H2 MFC set to  0.000000
6/26/2012	4:51:11 PM	BCl3 MFC set to  0.000000
6/26/2012	4:51:11 PM	PH3 MFC set to  0.000000
6/26/2012	4:51:11 PM	SiCl4 MFC set to  0.000000
6/26/2012	4:51:11 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:51:11 PM	Tube furnace set to 0
6/26/2012	4:51:12 PM	Run finished at 4:51 PM
6/26/2012	4:55:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	4:55:17 PM	Recipe started at 4:55 PM
6/26/2012	4:55:17 PM	Helium valve closed
6/26/2012	4:55:17 PM	H2 valve closed
6/26/2012	4:55:17 PM	BCl3 valve closed
6/26/2012	4:55:17 PM	PH3 valve closed
6/26/2012	4:55:17 PM	SiCl4 pre valve closed
6/26/2012	4:55:17 PM	SiCl4 post valve closed
6/26/2012	4:55:17 PM	Main Vac valve closed
6/26/2012	4:55:17 PM	Bypass valve closed
6/26/2012	4:55:17 PM	Bubbler valve closed
6/26/2012	4:55:17 PM	Helium MFC set to  0.000000
6/26/2012	4:55:17 PM	H2 MFC set to  0.000000
6/26/2012	4:55:17 PM	BCl3 MFC set to  0.000000
6/26/2012	4:55:17 PM	PH3 MFC set to  0.000000
6/26/2012	4:55:17 PM	SiCl4 MFC set to  0.000000
6/26/2012	4:55:17 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:55:17 PM	Tube furnace set to 0
6/26/2012	4:55:20 PM	H2 valve closed
6/26/2012	4:55:20 PM	BCl3 valve closed
6/26/2012	4:55:20 PM	PH3 valve closed
6/26/2012	4:55:20 PM	SiCl4 pre valve closed
6/26/2012	4:55:20 PM	SiCl4 post valve closed
6/26/2012	4:55:20 PM	Main Vac valve closed
6/26/2012	4:55:20 PM	Bypass valve closed
6/26/2012	4:55:20 PM	Bubbler valve closed
6/26/2012	4:55:20 PM	Helium valve opened
6/26/2012	4:55:20 PM	Helium MFC set to  500.000000
6/26/2012	4:55:20 PM	H2 MFC set to  0.000000
6/26/2012	4:55:20 PM	BCl3 MFC set to  0.000000
6/26/2012	4:55:20 PM	PH3 MFC set to  0.000000
6/26/2012	4:55:20 PM	SiCl4 MFC set to  0.000000
6/26/2012	4:55:20 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:55:20 PM	Tube furnace set to 0
6/26/2012	4:55:21 PM	Helium valve closed
6/26/2012	4:55:21 PM	H2 valve closed
6/26/2012	4:55:21 PM	BCl3 valve closed
6/26/2012	4:55:21 PM	PH3 valve closed
6/26/2012	4:55:21 PM	SiCl4 pre valve closed
6/26/2012	4:55:21 PM	SiCl4 post valve closed
6/26/2012	4:55:21 PM	Main Vac valve closed
6/26/2012	4:55:21 PM	Bypass valve closed
6/26/2012	4:55:21 PM	Bubbler valve closed
6/26/2012	4:55:21 PM	Helium MFC set to  0.000000
6/26/2012	4:55:21 PM	H2 MFC set to  0.000000
6/26/2012	4:55:21 PM	BCl3 MFC set to  0.000000
6/26/2012	4:55:21 PM	PH3 MFC set to  0.000000
6/26/2012	4:55:21 PM	SiCl4 MFC set to  0.000000
6/26/2012	4:55:21 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	4:55:21 PM	Tube furnace set to 0
6/26/2012	4:55:22 PM	Run finished at 4:55 PM
6/26/2012	4:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/26/2012	5:08:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/26/2012	5:08:53 PM	Recipe started at 5:08 PM
6/26/2012	5:08:53 PM	Helium valve closed
6/26/2012	5:08:53 PM	H2 valve closed
6/26/2012	5:08:53 PM	BCl3 valve closed
6/26/2012	5:08:53 PM	PH3 valve closed
6/26/2012	5:08:53 PM	SiCl4 pre valve closed
6/26/2012	5:08:53 PM	SiCl4 post valve closed
6/26/2012	5:08:53 PM	Main Vac valve closed
6/26/2012	5:08:53 PM	Bubbler valve closed
6/26/2012	5:08:53 PM	Bypass valve opened
6/26/2012	5:08:53 PM	Helium MFC set to  0.000000
6/26/2012	5:08:53 PM	H2 MFC set to  0.000000
6/26/2012	5:08:53 PM	BCl3 MFC set to  0.000000
6/26/2012	5:08:53 PM	PH3 MFC set to  0.000000
6/26/2012	5:08:53 PM	SiCl4 MFC set to  0.000000
6/26/2012	5:08:53 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	5:08:53 PM	Tube furnace set to 0
6/26/2012	5:10:07 PM	Helium valve closed
6/26/2012	5:10:07 PM	H2 valve closed
6/26/2012	5:10:07 PM	BCl3 valve closed
6/26/2012	5:10:07 PM	PH3 valve closed
6/26/2012	5:10:07 PM	SiCl4 pre valve closed
6/26/2012	5:10:07 PM	SiCl4 post valve closed
6/26/2012	5:10:07 PM	Main Vac valve closed
6/26/2012	5:10:07 PM	Bubbler valve closed
6/26/2012	5:10:07 PM	Bypass valve opened
6/26/2012	5:10:07 PM	Helium MFC set to  0.000000
6/26/2012	5:10:07 PM	H2 MFC set to  0.000000
6/26/2012	5:10:07 PM	BCl3 MFC set to  0.000000
6/26/2012	5:10:07 PM	PH3 MFC set to  0.000000
6/26/2012	5:10:07 PM	SiCl4 MFC set to  0.000000
6/26/2012	5:10:07 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	5:10:07 PM	Tube furnace set to 0
6/26/2012	5:11:07 PM	Helium valve closed
6/26/2012	5:11:07 PM	H2 valve closed
6/26/2012	5:11:07 PM	BCl3 valve closed
6/26/2012	5:11:07 PM	PH3 valve closed
6/26/2012	5:11:07 PM	SiCl4 pre valve closed
6/26/2012	5:11:07 PM	SiCl4 post valve closed
6/26/2012	5:11:07 PM	Bypass valve closed
6/26/2012	5:11:07 PM	Bubbler valve closed
6/26/2012	5:11:07 PM	Main Vac valve opened
6/26/2012	5:11:07 PM	Helium MFC set to  0.000000
6/26/2012	5:11:07 PM	H2 MFC set to  0.000000
6/26/2012	5:11:07 PM	BCl3 MFC set to  0.000000
6/26/2012	5:11:07 PM	PH3 MFC set to  0.000000
6/26/2012	5:11:07 PM	SiCl4 MFC set to  0.000000
6/26/2012	5:11:07 PM	Bypass solenoid MFC set to  0.000000
6/26/2012	5:11:08 PM	Tube furnace set to 0
6/26/2012	5:11:09 PM	Run finished at 5:11 PM
6/26/2012	5:11:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
